Self-sensing cantilevers
from SCL-Sensor.TechSCL-Sensor.Tech develops and manufactures silicon piezo-resistive self-sensing cantilevers. This type of all-electrical cantilever allows completely new applications in the fields of AFM, nanoprobing, force measurement and other sensing applications.
Self-sensing cantilevers are equipped with a full piezo-resistive Wheatstone bridge that directly measures the cantilever signal electrically, removing the space-consuming requirement for an optical readout. Two variable resistors are on the cantilever and two on the chip. The cantilever chip is bonded onto a small PCB with a small connector for a quick and highly reproducible cantilever exchange. The sensor signal is read out and amplified by a small pre-amplifier PCB. This enables an easy and seamless integration with various instruments (e.g., SEM, TEM and many other measurement systems). The self-sensing cantilevers are available with a variety of resonance frequencies and spring constants.
Eigenschaften- Self-sensing cantilevers with Silicon tip
- Self-sensing cantilevers without tip
- Self-sensing cantilevers with single crystal diamond tip
Weitere Informationen
Self-Sensing Cantilevers with Silicon Tip
This is considered the standard type of self-sensing cantilever. It exhibits a sharp tip made of silicon with a tip radius of <15 nm. Normally, the cantilever is delivered on our cantilever PCB (CL-PCB) with a small 10 pin connector on its lower side. On request you can order only the Si chip without PCB and connector for bonding on your own PCB holder.
This cantilever type can come with or without an integrated heater. PRSA (Piezo-Resistive Sensing & Active) cantilever probes are equipped with an additional thermal actuator (heater structure) on the cantilever. PRS (Piezo-Resistive Sensing) cantilever probes provide the sensing Wheatstone bridge (without a thermal actuator).
Self-Sensing Tipless Cantilevers
These are self-sensing cantilevers without a tip (tipless, TL). This cantilever type is especially suitable for torque magnetometry, force sensing, gas property measurements, and many more applications. The free place where normally the AFM tip is located can be used to accept your own tip, glue a sample, or other uses. Normally, the cantilever is delivered on our cantilever PCB (CL-PCB) with a small 10 pin connector on its lower side. On request you can order only the Si chip without PCB and connector for bonding on your own PCB holder.
This cantilever type can come with or without an integrated heater. PRSA (Piezo-Resistive Sensing & Active) cantilever probes are equipped with an additional thermal actuator (heater structure) on the cantilever. PRS (Piezo-Resistive Sensing) cantilever probes provide the sensing Wheatstone bridge (without a thermal actuator).
Self-Sensing Cantilevers with Single Crystal Diamond Tip
These are self-sensing cantilevers with a hard, sharp, long-life single crystal diamond tip (SCD). The cantilever is delivered on our cantilever PCB (CL-PCB) with a small 10 pin connector on its bottom side.
This cantilever type can come with or without an integrated heater. PRSA (Piezo-Resistive Sensing & Active) cantilever probes are equipped with an additional thermal actuator (heater structure) on the cantilever. PRS (Piezo-Resistive Sensing) cantilever probes provide the sensing Wheatstone bridge (without a thermal actuator).
Spezifikation
Silicon Tip Cantilevers (Si-Tip) | Tipless Cantilvers (TL) | Single Crystal Diamond Tip Cantilevers (SCD) | |||
---|---|---|---|---|---|
Model ** | PRSA-L300-F60-Si-CHP | PRSA-L300-F60-TL-CHP | PRSA-L300-F50-SCD-PCB | ||
PRSA-L300-F50-Si-PCB | PRSA-L300-F80-Si-PCB | PRSA-L300-F50-TL-PCB | PRSA-L300-F80-TL-PCB | ||
Tip radius (apex) | <15 nm | <15 nm / 12…16 µm | |||
Tip height | 4…6 µm | Long life Single Crystal Diamond (SCD) <100> along tip axis | |||
Tip material | silicon | non-conducting temp-stability: up to 70°C | |||
Resonant frequency ** | 30..65 kHz | 65…95 kHz | 30…65 kHz | 65…95 kHz | 30..65 kHz |
Spring constant ** | 1…15 N/m | 15…56 N/m | 1…15 N/m | 15…56 N/m | 1…15 N/m |
Recomm. AFM mode | contact, non-contact | non-contact | contact, non-contact | ||
sensitivity* | 1…2 µV/nm | 1…2 µV/nm | 1…2 µV/nm | ||
force sensitivity* | 0.5…56 nN/µV | 0.5…56 nN/µV | 0.5…56 nN/µV | ||
Length, width | 300 ±5 µm, 110 ±3 µm | 300 ±5 µm / 110 ±3 µm | 300 ±5 µm, 110 ±3 µm | ||
Material | silicon cantilever, boron doped 1k Ohm piezo resistors, aluminium tracks | silicon cantilever, boron doped 1k Ohm piezo resistors, aluminium tracks | silicon cantilever, boron doped 1k Ohm piezo resistors, aluminium tracks | ||
Deflection sensing | on chip piezo-resistive bridge | on chip piezo-resistive bridge | on chip piezo-resistive bridge | ||
Actuator | external shaker or on chip heater (20-45 Ohm) | external shaker or on chip heater | external shaker or on chip heater (20-45 Ohm) | ||
Electrical connections | bonded to small PCB with connector (counter part PCB available) or optional bonding pads on chip | bonded to small PCB with connector (counter part PCB available) or optional bonding pads on chip | bonded to small PCB with connector (counter part PCB available) or optional bonding pads on chip | ||
Chip dimensions (h, w, l) | 0.3 / 1.2 / 2.5 mm | 0.3 / 1.2 / 2.5 mm | 0.3 / 1.2 / 2.5 mm | ||
* not amplified (signal direct at the chip), 2.048 V bridge supply ** Cantilever models are divided in two parameter ranges when electrical characterization is possible with bonded cantilevers | * not amplified (signal direct at the chip), 2.048 V bridge supply ** Cantilever models are divided in two parameter ranges when electrical characterization is possible with bonded cantilevers | * not amplified (signal direct at the chip), 2.048 V bridge supply |
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Quantum Design GmbH
Im Tiefen See 58
64293 Darmstadt
Germany
Telefon: | +49 6151 8806-0 |
Fax: | +49 6151 8806920 |
E-Mail: | germany@qd-europe.com |