Our partnerQuorum

RF-Plasma etcher

K1050X from Quorum Technologies

The modern, solid-state 13.56 MHz plasma reactor K1050X is designed for the requirements of research and development and small-scale production. It is suitable for a wide range of plasma etching/ashing and cleaning applications.

Features
  • Plasma etcher/asher/cleaner
  • Drawer type specimen stage
  • Fully programmable via microcontroller
  • Two gas flow meters
  • Modern, solid-state 13.56 MHz (RF) power supply (100 W)

Further information

The  RF-Plasma etcher K11050X operates fully automatically. Micro-processed control provides durable and simple operation. K1050X uses low pressure, RF-induced gaseous discharge to modify surfaces or remove material in a controlled way. The system has a horizontally mounted 110 mm diameter x 160 mm length borosilicate glass chamber with a slide-out specimen drawer and viewing window.

It features radio frequency power of up to 100 Watt at 13.56 MHz and can be infinitely controlled and pre-set to required values. Power is automatically impedance-matched to any variation in system or loading.

Options:

  • Capacitance manometer- for use with CF4 and similar reactive gases
  • Quartz chamber and door (replaces standard borosilicate chamber and door)
  • K1050XT - A turbo-molecular pumped version is available - please contact us for information

Specification

K1050X RF Plasma etcher/asher/cleaner
Instrument case450 mm x 350 mm x 300 mm (WxDxH), Weight: 25 kg
Barrel work chamberBorosilicate glass 110 mm Ø x 160 mm
Rack out drawerSliding drawer assembly with specimen holder tray
Plasma outputRF power supply - solid state 150 W RF
Vacuum gaugeActive gauge head with fully operating vacuum range display (atmosphere to 1x10-5 mbar. Normal operating vacuum 0.5 mbar to 1.0 mbar)
TimerDisplays elapsed time with range selection: 99.9 hours with automatic termination of the plasma process
Dual gas flow gaugesDual gas needle valve flow control, selectable for either or both gases
Electrical supply230 V/50 Hz (5 A max including pump),
115 V/60 Hz (10 A max including pump)
ServicesProcess gas at nominal 5 psi (0.33 bar)
Vacuum pumpRequires a rotary pump with a capacity of 50 l/min. or greater. A special version is recommended for oxygen gas applications
EK3158K1050X RF plasma barrel reactor (rotary pump also required - see optional accessories)
EK3161K1050XT RF plasma barrel reactor with built in 50 l/sec. turbo-molecular pump (rotary pump also required - see pptional accessories)
Pumps and optional accessories
VTM-Duo5Pfeiffer DUO 5 two-stage pump
EK3171Scroll pump
EK4222Quartz chamber and door
(replaces the standard borosilicate chamber and door)

Applications

Asbestos and man-made mineral fiber detection using plasma ashing preparation techniques
Plasma etching (removal) of photoresist and epilayers
Low temperature plasma ashing of organic materials (epoxy resins, filters, foodstuff, etc.)
Surface treatment of plastics for hydrophobic to hydrophilic conversion
Improving painting and inking characteristics of plastics
Plasma etching and plasma ashing of organic specimens for SEM and TEM examination
Plasma cleaning of SEM, TEM and SPM parts

Downloads

K1050X RF Plasma asher
K1050X RF Plasma asher

Contact

Anne Kast
Anne Kast

Related products

Tissue chopper
Tissue chopper
The McIlwain TC752 tissue chopper has been specifically developed for the preparation of microscopic sections of small and irregularly shaped samples (biopsy, small organs etc.). The special design of ...
Manual critical-point dryer
Manual critical-point dryer
Quorum’s critical point dryer model E3100 is well-established in many laboratories and has been used successfully for more than 40 years.  Large valves and two large display instruments for pressure ...
Automatic critical-point dryer
Automatic critical-point dryer
Critical point dryer K850 combines versatility and ease of operation. Built-in thermo-electric heating and adiabatic cooling allow precise temperature control. The vertical pressure chamber (32 mm in ...
Cryo preparation system for scanning electron microscopy
Cryo preparation system for scanning electron microscopy
The cryo preparation system allows the analysis of wet samples with scanning electron microscopy (SEM) at temperatures down to -190 °C. During cryo preparation, samples are frozen rapidly and fed ...
Freeze Dryer
Freeze Dryer
Freeze-drying is a well-established method to prepare specimens for TEM and SEM. Freeze-drying reduces the distortion and shrinkage effects that occur when a wet sample dries by normal evaporation. ...

Contact

Quantum Design GmbH

Im Tiefen See 58
64293 Darmstadt
Germany

Phone:+49 6151 8806-0
Fax:+49 6151 8806920
E-mail:germany@qd-europe.com
Cookie notice Cookies help us in providing our services. By using our services, you agree to the use of cookies. Privacy policy
Anne KastProduct Manager - Electron microscopy
+49 6151 8806-456
kast@qd-europe.com