Our partnerQuorum

Carbon coater & thermal evaporator – high vacuum

K975X from Quorum Technologies

The K975X carbon coater is a compact thermal evaporator for vacuum deposition of thin layers of carbon and metals for SEM and TEM applications. The K975 series consists of the carbon and metal evaporator s K975X and  K975S, designed to coat 8” wafers or similarly large specimens with carbon (C). 

Features
  • Unique ‘anti-stick’ carbon rod gun evaporation assembly
  • Built-in turbo pump
  • Suitable for specimens up to 140 mm² or 200 mm diameter
  • Rack-out drawer specimen loading system
  • Restricted or full vent control

Further information

The K975X is fitted with a carbon rod gun and metal evaporation insert. It can also be used for cleaning TEM and SEM apertures and for sputtering (optional sputter head insert). The chamber (borosilicate glass) is 250 mm in diameter x 300 mm length and can accommodate specimens up to 8"/200 mm in diameter. An easy rack-out specimen loading system provides comfortable access. A flat 80 mm stage is standard, but can be exchanged for optional holders like the 3 mm grid holder, the low-angle shadowing attachment or rotary planetary stage. For quick specimen exchange without removing the glass chamber, the rotary stage is mounted on a sliding access port on the side of the chamber. The flat stage can be tilted from 0° to +/- 180° for rotary shadowing techniques.

K975S Thermal Evaporator
The K975S is based on the K975X. It features a special load lock door which allows loading wafers up to 8"/200 mm. Please contact us for more information.

Specification

Specification
Weight and dimensions450 mm W x 500 mm D x 300 mm H. Weight: 65 kg
Work chamberBorosilicate glass with hinged metal top plate, 250 mm Ø x 300 mm H (can accommodate wafers to 200 mm if K975S is specified)
Safety shieldPolycarbonate cylinder - removable for maintenance
Carbon sourceAdjustable height with tilt control of 0–200°. Uses 6.15 mm Ø carbon rods
Metal sourceAdjustable height with tilt control of 0–200°. Supplied with pack of 10 tungsten specimen baskets
Specimen stageIncludes 0–45° tilt facility
Vacuum gauge rangeATM   1x10-7 mbar
Operating vacuum1x10-5 mbar, typically achieved within 15 minutes
Low voltage evaporation supplyPulsed or variable control. Selectable: 0-5 V-15 V-25 V, out-gas current: 0–25 A
ServicesNitrogen gas (if used for venting). Argon gas (if the optional sputtering attachment is fitted).
Vacuum pumping100 l/sec. turbomolecular pump. Requires a 50 l/min. ‘backing’ rotary pump with oil mist filter (AG-DS102)
Electrical supply230 V/50 Hz (8 A maximum including pump), 115 V/60 Hz (16 A maximum including pump)
Supplied withAccessory kit including: carbon rods (6.15 mm x 100 mm), evaporation filaments, S8651 manual rod shaper and operating manual
K975X (EK3154)Turbo-pumped thermal evaporator
K975S (EK3153)K975S Turbo-pumped thermal evaporator with loading stage to accept an 200 mm wafer
PumpingNB: A 50 l/min. rotary pump is needed to ‘back’ the turbo pump (AG-DS102 recommended for normal use)
AG-DS102Agilent two-stage pump, oil mist filter, rotary pump oil
EK3172nXDS 10i scroll pump
Stages and other options
EK4160Low-angle shadowing, ideal for flat TEM specimens
EK4205Rotary planetary specimen stage with externally adjustable tilt
EK4175Sputtering module, including chromium (Cr) target (other targets available as options)
10983Film thickness monitor attachment with controller mounted in the K975X console. Includes monitor and stage complete with quartz crystal holder and quartz crystal

Downloads

Turbopumped thermal high vacuum evaporator
Turbopumped thermal high vacuum evaporator

Contact

Anne Kast
Anne Kast

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Contact

Quantum Design GmbH

Im Tiefen See 58
64293 Darmstadt
Germany

Phone:+49 6151 8806-0
Fax:+49 6151 8806920
E-mail:germany@qd-europe.com
Anne KastProduct Manager - Electron microscopy
+49 6151 8806-456
kast@qd-europe.com