Fast spectroscopic ellipsometer M-2000

From Woollam Co.

The M-2000 ellipsometer combines highly accurate 'rotating compensator' method with fast CCD technology. This allows high speed measurements: min. 390 wavelengths in < 1 second. It is available as ex-situ and in-situ setup.

Features
  • Ex-situ, in-situ, or inline
  • Rotating compensator ellipsometer
  • Modular design with variety of options and configurations
  • Maximum spectral range 193 to 1690 nm
  • Fully automated

Further information

The M-2000 utilizes our patented rotating compensator ellipsometer (RCE) technology to achieve high accuracy and precision. The RCE design is compatible with advanced CCD detection to measure ALL wavelengths simultaneously. This ellipsometer collects over 700 wavelengths from the ultraviolet to the near-infrared. With modular optical design, the M-2000 can be attached directly to your process chamber or configured on any of our table-top bases. Advanced design ensures accurate ellipsometry measurements for any sample and includes measurement features like Generalized Ellipsometry, Mueller matrix, and depolarisation.

Specifications

Available spectral ranges

  • M-2000V: 370 to 1000 nm (390 wavelengths)
  • M-2000U/X: 245 to 1000 nm (470 wavelengths)
  • M-2000D: 193 to 1000 nm (500 wavelengths)
  • NIR extension: 1010 to 1690 nm (200 wavelengths)

Available options

  • NIR extension
  • NIR diode array extends spectral range of models "V", "U/X" and "D" to 1690 nm with additional 200 wavelenghts, 1000 nm to 1690 nm

Available ex-situ stages

  • Single angle stage, horizontal sample mount: 65°
  • Computer controlled angle of incidence goniometer, vertikale (20 to 90°) or horizontal (45 to 90°) sample mount

In-situ package

Included UHV windows to mount to UHV chambers, tilt units, and mounting elements for 2" vacuum flanges

Automated sample translation

  • 100 mm x 100 mm XY (only horizontal sample mount)
  • 200 mm x 200 mm XY (only horizontal sample mount)
  • 300 mm x 300 mm XY (only horizontal sample mount)

Manual sample translation

  • 50 mm x 50 mm XY (only horizontal sample mount)
  • 100 mm x 100 mm XY (only horizontal sample mount)

Focusing

  • Attachable focusing probes to achieve spot size of 150 to 300 µm (depending on model)
  • For collimated beam measurements, the focusing probes can easily be removed

Applications

Optical constants and thickness, anisotropy, index gradient, composition The M-2000 is an extremely accurate system to determine optical constants, thickness, optical anisotropy, index gradient, composition, etc.
Homogeneity - thickness profile In combination with an automated XY mapping stage, sample homogeneity, thickness profile etc. can be determined with automated measurement recipes
Dynamic measurements - adsorption kinetics Dynamic measurements can be performed either with the in-situ package attached to an UHV deposition chamber or with liquid and heat cells attached to an ex-situ M-2000. Thus, the time-dependent adsorption of molecules out of a liquid ambient can be traced and measured in real-time. Alternatively, temperature-dependent changes of the sample can be determined, like phase-transitions or the glass transition temperature of polymers.

Downloads

Spectroscopic ellipsometers product overview
M-2000 brochure
In situ brochure
In situ M-2000
About Woollam Co.

Contact

Thomas Wagner
Thomas Wagner

Related products

In-situ spectroscopic ellipsometer iSE
The iSE is a new in-situ spectroscopic ellipsometer developed for real-time monitoring of thin film processing.  Using our proven technology, the iSE enables users to optimize optical properties of ...
Dual rotating compensator ellipsometer RC2
The RC2 is the first spectroscopic ellipsometer with two rotating compensators. It combines the best features of previous instruments with innovative new technology: dual rotating compensator, ...
Economic high precision table top ellipsometer alpha 2.0
Spectroscopic ellipsometer alpha 2.0 is a fast, low-cost system for measuring film thickness and optical constants. Everything is contained in an amazingly small package. It is the ideal table top ...
Widest spectral range ellipsometer VASE
The VASE is our most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers and more.
Spectroscopic ellipsometer for Vacuum Ultra Violet: VUV-VASE
The VUV-VASE variable angle spectroscopic ellipsometer is the standard in optical characterization of materials used in lithography applications. Its measurement range spans vacuum ultraviolet (VUV) ...
FTIR ellipsometer IR-VASE
The IR-VASE is the first and only spectroscopic ellipsometer to cover the spectral range from 1.7 to 30 microns (333 to 5900 wavenumbers). The IR-VASE can determine both n and k for materials over the ...
Ellipsometer for texture Si solar cells T-Solar
T-Solar, a special intensity optimized M-2000, addresses the measurement requirements on textures Si wafer surfaces.

Contact

Quantum Design GmbH

Breitwieserweg 9
64319 Pfungstadt
Germany

Phone:+49 6157 80710-0
Fax:+49 6157 807109
E-mail:germanyqd-europe.com
Thomas WagnerProduct Manager - Ellipsometry & Surface Science
+49 6157 80710-68
Write e-mail