Sputter-Targets / Materials

By cathode sputtering (sputtering) samples or substrates can be coated with a wide variety of metals / metal alloys or electrically conductive materials. The coating material is referred to as a sputtering target.

Features
  • Targets for all current Quorum sputter coaters
  • Disc targets (Ø 57 mm) also for older Quorum/Emitech/Polaron/… coaters
  • High-purity metals / alloys
  • Wide range of materials
  • Other materials and sizes on request

Specifications

Disk Targets (Ø 57 mm)
Suited for : E5000 / E5200 / E5400/ SC502/ SC7610 / SC7620 / Q150R (S/ES) Plus / Q150T (S/ES) Plus / Q150V (S/ES) Plus / Q300T(D/T) Plus* / K5 75X(XD*) / K675X(XD)* / SC3000
Gold / (Au)
Gold/Palladium (80% / 20%) / (Au / Pd)
Gold/Palladium (60% / 40%) / (Au / Pd)
Platinum / (Pt)
Platinum/Palladium (80%/20%) / (Pt / Pd)
Palladium / (Pd)
Silver / (Ag)
Copper / (Cu)
Nickel / (Ni)
Disk Targets (Ø 57mm) for high vacuum sputter coaters
Suited for : Q150T (S/ES) Plus / Q150V (S/ES) Plus / Q300T(D/T) Plus* / K575X(XD*) / K675X(XD)* / SC3000
Aluminium / (Al)
Carbon / (C)
Chromium / (Cr)
Cobalt / (Co)
Indium Tin Oxid (ITO)
Iridium / (Ir)
Iron / (Fe)
Magnesium / (Mg)
Molybdenumn / (Mo)
Wolfram / (W)
Titanium / (Ti)
Tantalum / (Ta)
Tin / (Sn)

 Other materials, diameter and thicknesses on request

*These machines need 2 different or 3 targets of the same kind.

Contact

Dr. Andreas Bergner
Dr. Andreas Bergner
Anne Kast
Anne Kast

Contact

Quantum Design GmbH

Breitwieserweg 9
64319 Pfungstadt
Germany

Phone:+49 6157 80710-0
Fax:+49 6157 807109
E-mail:germanyqd-europe.com
Dr. Andreas BergnerProduct Manager - Electron microscopy & nanotechnology
+49 6157 80710-12
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Anne KastProduct Manager - Electron microscopy
+49 6157 80710-456
Write e-mail