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Arc single crystal furnace

Tetra Arc Furnace TAC-5100J from QuantumDesign

In the Tetra Arc Furnace, high-melting-point material is melted by four electric arcs discharged in inert Argon gas. The single crystal is grown using the Czochralski method.

  • Melting temperature up to 3000 °C
  • Four electric arcs
  • Uniformly distributed high-temperature region
  • High vacuum system (5x10-6 Torr)
  • Chamber vacuum reached in less than one hour

Further information

In Tetra Arc, polycrystalline material is melted by four electric arcs in a rotating, chilled copper hearth. A chilled tungsten pulling rod is dipped into the hot melt. While rotating, the pulling rod is slowly lifted to grow the crystal. To prevent the oxidation of both melt and crystal, the entire process is performed in an oxygen- and moisture-free atmosphere.

Suitable materials crystallized by this method include intermetallic compounds that are potentially damaged by oxidization. For this purpose, the furnace includes a high vacuum system to prevent oxidization (5x 10-6 Torr).


ChamberStainless steel (double walled and cooling water
Working pressure range5x10-6 Torr (within 1 hour)~1.1 Atm
Vacuum discharge systemTurbo molecular pump: 220 L/sec and rotary pump 100 L/min
Vacuum gage measurement range760 Torr~1x10-9 Torr
Arc generator/Getter generator200 A/each generator for each electrode x 5 units
Pulling shaftShaft sealStainless/ferro-fluidic seal and bellows
 Normal travel speed0-39 mm/hr (servo-motor)
 Travel stroke150 mm
 Speed stability travel±1.0 % FS
 Rapid travel speed175 mm/min (fix)
 Rotation speed0-10 rpm
Hearth shaftShaft sealStainless /ferro-fluidic seal and bellows
 Rotation speed0-10 rpm


Intermetallic compounds


Tetra arc furnace specification
Tetra arc furnace specification


Reference customers

Single-Crystal Growth of f-Electron Intermetallics in a Tetra-Arc Czochralski Furnace, M. Szlawska and D. Kaczorowski, ACTA Physica Polonica A, Vol. 124, Page 336 (2013).


Stephane Struyve
Stephane Struyve


Quantum Design GmbH

Meerstraat 177
B-1852 Grimbergen

Phone+32 230 84324
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Stephane StruyveSales Manager
+32 2 3084324