Fast Mapping theta-SE
Our partnerWoollam

Fast Mapping theta-SE

From Woollam Co.

The theta-SE is a push-button spectroscopic ellipsometer for characterizing thin film uniformity. It features advanced ellipsometry instrumentation in a compact package at an affordable price.

  • Fully integrated
  • High Speed
  • Compact
  • User Friendly
  • Affordable

Further information

The theta-SE comes equipped with 300mm sample mapping, small-spot measurement beam, fast automated sample alignment, look-down camera and our latest Dual-Rotating ellipsometer technology. The theta-SE has everything you need to measure spatial uniformity of your film thickness and optical properties.


  • Spectral range: 400 to 1000nm
  • Number of wavelengths (measured simultaneously): 190
  • Detector: CCD
  • Spot size: 250 x 600µm (on sample)
  • Data Acquisition Rate (per measurement spot, entire spectrum): 0.3 sec (fastest), 1-2 sec (typical)
  • Angel of incidence: 65°
  • Data Types: Spectroscopic ellipsometry and advanced g-SE or Mueller Matrix-SE


Optical constants of layers
Thickness of thin films
Homogeneity thickness profile


theta-SE brochure
theta-SE brochure
Spectroscopic ellipsometers product overview
Spectroscopic ellipsometers product overview


Stephane Struyve
Stephane Struyve


Quantum Design GmbH

Meerstraat 177
B-1852 Grimbergen

Phone+32 230 84324
Mobil:+32 495 797175
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Stephane StruyveSales Manager
+32 2 3084324