Sputter-Targets / Materials

Sputter-Targets / Materials

By cathode sputtering (sputtering) samples or substrates can be coated with a wide variety of metals / metal alloys or electrically conductive materials. The coating material is referred to as a sputtering target.

Features
  • Targets for all Quorum / Polaron / Emitech et al. Sputter Coater
  • High-purity metals / alloys
  • Wide range of materials
  • Other materials, diameter and thicknesses on request

Specification

Disk Targets (Ø 57 mm)Thickness0,1 mm0,5 mm
Suitable for : E5000 / E5200 / E5400/ SC502/ SC7610 SC7620 / Q150R (S/ES) / Q300RT / Q150T (S/ES) / Q300T(D/T) / K575X(XD) / K675X(XD) / SC3000
Gold / (Au)**
Gold/Palladium (80% / 20%) / (Au / Pd)**
Gold/Palladium (60% / 40%) / (Au / Pd)*0,6 mm
Platinum / (Pt)**
Platinum/Palladium (80%/20%) / (Pt / Pd)**
Palladium / (Pd)**
Silver / (Ag)**
Copper / (Cu)1,0 mm
Nickel / (Ni)**
Additional Targets only suitable for: Q150T (S/ES) / Q300T(D/T) / K575X(XD) / K675X(XD) / SC3000
Disk Targets (Ø 57mm)Thickness / mm
Aluminium / (Al)1,0
Carbon / (C)1,5
Chromium / (Cr)(0,3) / 1,5 / 3,0
Cobalt / (Co)1,0
Indium Tin Oxid (ITO)3,0
Iridium / (Ir) 
Iron / (Fe)0,1
Magnesium / (Mg)2,0
Molybdenumn / (Mo)1,0 /2,0 /3,0
Wolfram / (W)0,5 /1,0
Titanium / (Ti)1,5
Tantalum / (Ta)1,0
Tin / (Sn)1,0

Other materials, diameter and thicknesses on request

DiskTargets bonded onto a backing Plate (Ø 60mm)    Thickness 0,1 mm   0,4 mm 
Suitable for : K350X / K500X / K550X / K650X(XT)
Gold / (Au)**
Gold/Palladium (80% / 20%) / (Au / Pd)**
Gold/Palladium (60% / 40%) / (Au / Pd)* 
Platinum / (Pt)**
Platinum/Palladium (80%/20%) / (Pt / Pd)* 
Palladium / (Pd)**
Silver / (Ag)**
Nickel / (Ni)* 

Other materials, diameter and thicknesses on request

 Annular targets mounted on a ring holder
( OD 82mm / ID 60mm)
Thickness0,1 mm0,4 mm
suitable für : SC7640 / SC7680
Gold / (Au)**
Gold/Palladium (80% / 20%) / (Au / Pd)**
Platinium / (Pt)**
Platinium/Palladium (80%/20%) / (Pt / Pd)**
Palladium / (Pd)**
Silver / (Ag)**

 Other materials, diameter and thicknesses on request

Contact

Quantum Design AG

Route du Roule 41
CH-1723 Marly
Switzerland

Phone:+41 21 8699-033
E-Mail:switzerland@qd-europe.com
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