Our partnerWoollam

Widest spectral range ellipsometer VASE

From Woollam Co.

The VASE is our most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers and more.

Features
  • Ex-situ spectroscopic ellipsometer
  • Wide spectral range from 193 to 4000 nm
  • Maximum data accuracy
  • High spectral resolution and perfect R&D flexibility

Further information

It combines high accuracy and precision with a wide spectral range from 193 to 4000 nm. Variable wavelength and angle of incidence allow flexible measurement capabilities including:

  • Reflection and transmission ellipsometry
  • Generalized ellipsometry
  • Reflectance (R) intensity
  • Transmittance (T) intensity
  • Cross-polarized R/T
  • Depolarization
  • Scatterometry
  • Mueller matrix

Maximum data accuracy

The VASE features a rotating analyzer ellipsometer (RAE) combined with our patented AutoRetarder for unparalleled data accuracy.

High-precision wavelength selection

The HS-190TM scanning monochromator is designed specifically for spectroscopic ellipsometry. It optimizes speed, wavelength accuracy, and light throughput, while automatically controlling selection of wavelengths and spectral resolution.

Flexible measurements

The VASE features a vertical sample mount to accommodate a large variety of measurement geometries including reflection, transmission, and scattering.

Specification

  • vertical sample mount
  • computer-controlled angle of incidence goniometer 20° - 90°
  • single or double chamber monochromator
  • spectral range 250 - 2500 nm (standard)
  • DUV from 193 nm
  • NIR to 3200 nm or 4000 nm
  • computer-controlled mapping unit: 50 mm XY
  • computer controlled sample rotator
  • AutoRetarder
  • manual 50 mm XY translation
  • 200 µm focused beam option
  • camera
  • cryostat (4.2 to 500 K or 4.2 to 800 K)
  • heat cell (RT to 300 °C or -80 °C to +600 °C)

Applications

Semiconductors Bandgap, electronic transitions and critical points can be measured for semiconductor materials such as GaN, InP, SiGe, CdTe, etc. Good wavelength resolution and ability to measure depolarization ensure accurate optical constants.
Thick films For thicker films (>5 μm), good spectral resolution is needed to resolve the interference oscillation features of Ψ/Δ data. Operator defined monochromator step size and narrow bandwidth help resolve fine spectral features.
Photosensitve materials The monochromator is positioned before the sample, so only low intensity monochromatic light strikes the sample. This prevents exposure of photosensitive samples.
Anisotropic films and meta materials

Downloads

Spectroscopic ellipsometers product overview
Spectroscopic ellipsometers product overview
VASE brochure
VASE brochure

Contact

Julien Dumouchel
Julien Dumouchel

Related products

Fast spectroscopic ellipsometer M-2000
Fast spectroscopic ellipsometer M-2000
The M-2000 ellipsometer combines highly accurate 'rotating compensator' method with fast CCD technology. This allows high speed measurements: min. 390 wavelengths in < 1 second. It is available as ...
Dual rotating compensator ellipsometer RC2
Dual rotating compensator ellipsometer RC2
The RC2 is the first spectroscopic ellipsometer with two rotating compensators. It combines the best features of previous instruments with innovative new technology: dual rotating compensator, ...
Economic high precision table top ellipsometer Alpha-SE
Economic high precision table top ellipsometer Alpha-SE
Spectroscopic ellipsometer Alpha-SE is a fast, low-cost system for measuring film thickness and optical constants. Everything is contained in an amazingly small package. It is the ideal table top ...
Spectroscopic ellipsometer for Vacuum Ultra Violet: VUV-VASE
Spectroscopic ellipsometer for Vacuum Ultra Violet: VUV-VASE
The VUV-VASE variable angle spectroscopic ellipsometer is the standard in optical characterization of materials used in lithography applications. Its measurement range spans vacuum ultraviolet (VUV) ...
FTIR ellipsometer IR-VASE
FTIR ellipsometer IR-VASE
The IR-VASE is the first and only spectroscopic ellipsometer to cover the spectral range from 1.7 to 30 microns (333 to 5900 wavenumbers). The IR-VASE can determine both n and k for materials over the ...
Ellipsometer for texture Si solar cells T-Solar
Ellipsometer for texture Si solar cells T-Solar
T-Solar, a special intensity optimized M-2000, addresses the measurement requirements on textures Si wafer surfaces.
In-situ spectroscopic ellipsometer iSE
In-situ spectroscopic ellipsometer iSE
The iSE is a new in-situ spectroscopic ellipsometer developed for real-time monitoring of thin film processing.  Using our proven technology, the iSE enables users to optimize optical properties of ...

Contact

Quantum Design AG

Route du Roule 41
CH-1723 Marly
Switzerland

Phone:+41 21 8699-033
E-Mail:switzerland@qd-europe.com
Cookie notice Cookies help us in providing our services. By using our services, you agree to the use of cookies. Privacy policy
Julien DumouchelSales Manager
+41 21 8699033
dumouchel@qd-europe.com