Our partner Hitachi High-Tech

Ion Milling System IM4000Plus

from Hitachi High-Tech

Ion milling systems (IMS) utilize a (low-energy) Ar-ion beam to produce wide and undistorted cross-sections or in order to polish typical SEM samples - without applying mechanical stress to the sample. IMS are operated on either cross-section or flat milling mode. The IM4000 series by HITACHI are dual milling systems offering both operations.

Features
  • Faster milling with improved ion optics (> 500 μm/h at 6 kV)
  • Intermittent milling process for heat dissipation when handling thermally sensitive materials
  • Improved cryo operation with precise temperature control (cooling model)
  • Higher precision of mask position alignment for site specific cross-section milling

Further information

Example of the applicability of IM4000Plus

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IM4000 Series

The IM4000 can be operated in two modes.

For cross-section milling a broad, low-energy Ar+ ion beam is directed to the material to produce a wider, undistorted cross-section without applying mechanical stress to the sample. A mask is placed directly on top of the sample which protects the top surface and creates a sharp edge for a precise cut of the material.

Flat milling is e.g. used for SEM observation of metallographic microstructures or defects of various materials. Conventional mechanical sample preparation via grinding or polishing can result in deformation, flaws and artefacts that obscure the real structure of the material. The IM4000 eliminates mechanical stress and provides effectively a damage-less flat milling method to enhance mechanically prepared materials.

The IM4000 series offers a variety of configurations and options:

  • IM4000 Cross-section milling, removal up to 300 µm/h
  • IM4000Plus Cross-section milling, removal up to 500 µm/h
  • IM4000(Plus) Flat milling
  • Cooling Stage for accurate temperature control of sensitive samples
  • Specimen stage for air sensitive samples (Air protection specimen stage)
  • Fine pitch cross-section specimen holder
  • Stereo microscope unit

Further options

  • Cooling stage
  • Air protection specimen holder/stage
  • Zoom stereo microscope unit

Contact

Dr. Dominic Vogt
Dr. Dominic Vogt

Contact

Quantum Design GmbH

Breitwieserweg 9
64319 Pfungstadt
Germany

Phone:+49 6157 80710-0
Fax:+49 6157 807109
E-mail:germanyqd-europe.com
Dr. Dominic VogtProduct Manager - Electron microscopy
+49 6157 80710-557
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