Zygo ultra-high resolution Fizeau interferometer

Verifire HDX from Zygo

With its high internal ITF, Zygo's Verifire HDX interferometer is the ultimate Fizeau designed and built by Zygo, made to characterize mid-spatial frequency of extreme performance optical components and systems. Available in 4” and 6” versions its high ITF allows also to “see” a very high number of fringes in the field of view enabling to characterize, wanted or not, high-slope surfaces deviations.

Features
  • True on-axis Fizeau configuration ensures accurate metrology
  • Optimized internal design to transmit high frequencies
  • Low noise fast 3392x3392 pixels camera (96 Hz) = about 1500 fringes in the FOV
  • Zygo MX software
  • Classical PSI & anti-vibration QPSI technologies + optional dynamic DynaPhase

Further information

The Verifire HDX is the ultimate Fizeau made by Zygo. It includes all the great features of the popular Verifire HD - such as QPSI, and a long-life stabilized laser - and adds important enhancements like new best-in-class imaging and resolution for high instrument transfer function (ITF), superior characterization of mid-spatial frequency content and high-slope surface deviation. Zygo's DynaPhase dynamic acquisition technique can also be added optionally. QPSI and DynaPhase eliminate problems due to vibration and enables precision metrology in nearly any environment.

All characteristics

  • True on-axis Fizeau configuration ensures accurate metrology
  • Optimized internal design to transmit high frequencies
  • Low noise fast 3392x3392 pixels camera (96 Hz)
    • Resolves mid-spatial frequency surface features (about 1500 fringes in the FOV)
  • Fixed 1x magnification
  • Zygo MX software
  • Classical PSI technology (13 buckets)
  • Anti-vibration QPSI technology (30 buckets) for production environments
  • Optional DynaPhase technology for dynamic measurements
  • Stabilized long-life proprietary laser with industry-leading reliability
  • Wired and wireless remote control
  • Available in 4” & 6” mainframes

Downloads

Verifire HDX brochure
Verifire HDX Specs

Contact

Quantum Design GmbH

Roddarestigen 3
SE 182 35 Danderyd
Sweden

Phone:+46 8 41071791
E-mail:nordic@qd-europe.com