Apex XCT - CT submicronique ultra-rapide pour les semi-conducteurs
SIGRAYRéaliser une radiographie complète à haute résolution d’échantillons semi-conducteurs par XCT conventionnelle s’avère généralement long et fastidieux et génère souvent des problèmes d’artefacts sur les images.
Pour les surmonter, notre partenaire Sigray a développé l'Apex XCT-150. Spécifiquement conçu pour les échantillons semi-conducteurs (wafers ou les cartes graphiques etc.) l'Apex XCT-150 est capable d'obtenir des résultats comparables aux mesures XCT conventionnelles en quelques minutes au lieu de plusieurs heures.
- Imagerie 3D sur des échantillons intacts jusqu'à 300 mm de diamètre
- Résolution spatiale 3D de 0,5 µm en <15 minutes
- Pas d'artefacts liés au durcissement du faisceau
Plus d'informations
Computer Tomography is used since the early 2000 to get true 3D information with resolutions down to 1 µm without destroying the sample. However, there are several common problems with traditional ct system when measuring typical semicon samples like complete boards, wafers and PCBs. Those type of samples require very long measuring times and the results will often struggle with image artifacts such as beam hardening, streaking/curtaining, photon starvation and metal artifacts. The Apex XCT-150 overcomes these problems due to its unique and patented architecture.
Elemination of image artifacts
Apex XCT eliminates many of the imaging artifacts that affect operation of conventional 3D X-ray systems, such as beam hardening, streaking/curtaining, photon starvation, and metal artifacts. Compare the same region imaged with Apex XCT (Left) and a leading Conventional XRM/microCT (Right) – the Apex XCT result demonstrates a dramatic increase in image quality while also offering a significantly reduced scan time.
Caractéristiques techniques
Technical Specifications of the Apex XCT-150 | ||
Parameter | Specification | |
Overall | Spatial Resolution | 0.5 μm |
Minimum Voxel | 70 nm | |
Source | Type | Nanofocus Sealed Tube Transmission X-Ray Source |
Voltage | 30 - 160 kVp | |
Power | 25 W | |
Target(s) | Tungsten | |
Detector(s) | Type | 6.7 MP 50 micron pixel size 9 FPS 14x11 cm (Upgrade) 26.9 MP 50 micron pixel 22 fps 28x24 cm |
Visible Light Camera | 16MP alignment camera | |
Software | Command and Control | Sigray 3D with Intuitive interface |
Reconstruction | GigaRecon - fastest commercial CBCT reconstruction software | |
Continuous (or Fly) Scan Data Acquisition | Standard | |
Sample Handling Robot | Queue up to 20 samples without operator interventon | |
Linux Workstation | Interface is on a Windows workstation, while a separate robust Linux workstation controls the system. Advantageous for reliable 24-7 operation. | |
EPICS | Open-source software controls for maximum flexibility | |
Dimensions | Footprint | 224 cm L x 125 cm W x 234 cm H |
Sample Size | 300 mm diameter x 25 mm height |
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Quantum Design S.A.R.L.
1 avenue de l’Atlantique
Bâtiment Mac Kinley
91940 Les Ulis
France
Tél. : | 01 69 19 49 49 |
Email : | franceqd-europe.com |