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Theta-SE Carthographie rapide

Woollam Co.

Le theta-SE est un ellipsomètre spectroscopique presse-bouton pour la caractérisation de l'uniformité des couches minces. Il est doté de toutes les options utiles pour cette application (cartographie d'échantillons de 300 mm, optique de focalisation, caméra d’alignement rapide et la dernière technologie d'ellipsomètre à double rotation).

Caractéristiques

Tout inclus
Rapide
Compacte
Facile à utiliser
Abordable

Plus d'informations

The theta-SE comes equipped with 300mm sample mapping, small-spot measurement beam, fast automated sample alignment, look-down camera and our latest Dual-Rotating ellipsometer technology. The theta-SE has everything you need to measure spatial uniformity of your film thickness and optical properties.

Caractéristiques techniques

Spectral range: 400 to 1000nm
Number of wavelengths (measured simultaneously): 190
Detector: CCD
Spot size: 250 x 600µm (on sample)
Data Acquisition Rate (per measurement spot, entire spectrum): 0.3 sec (fastest), 1-2 sec (typical)
Angel of incidence: 65°
Data Types: Spectroscopic ellipsometry and advanced g-SE or Mueller Matrix-SE