Our partnerWoollam

In-situ spectroscopic ellipsometer iSE

From Woollam Co.

The iSE is a new in-situ spectroscopic ellipsometer developed for real-time monitoring of thin film processing.  Using our proven technology, the iSE enables users to optimize optical properties of deposited films, control film growth with sub-angstrom sensitivity, and monitor growth kinetics.

Features
  • In-situ
  • Dual rotating element "Ellipsometer"
  • Small and compact
  • Affordable
  • High measurement speed
  • Easy-to-use

Further information

Nearly all in-situ measurement applications require spectroscopic ellipsometry, but for many applications, a spectral range of 400 to 1000nm, like with iSE is completely sufficient. Without compromising on accuracy or precision. With its compact design, the iSE can also be installed at complex deposition chambers with little space available. The high measuring speed allows fast growth monitoring and real-time process control by communication of the powerful CompleteEASE software with the control center of the deposition chamber.

Specification

  • Spectral range: 400 nm to 1000 nm
  • Number of wavelengths (measured simultaneously): 190
  • Detector: CCD
  • Data acquisition rate: 0.3 sec (fastest), 1-2 sec (typical)
  • Beam diameter: ~3mm
  • Chamber requirements:
  • Port size: 2.75” CF (1.33” CF optional)
  • Typical port angle (angle of incidence): 60° - 75° ** measured from sample normal

Applications

Determining of thin film thickness of single and multi layers
Optical constants
Growth and etch rates
Process kinetics
Surface quality before and after processing
Real-time end-point detection
ALD, CVD, MBE, sputter, etc.

Downloads

Spectroscopic ellipsometers - product overview
Spectroscopic ellipsometers - product overview
iSE brochure 2017
iSE brochure 2017
In situ iSE 2018
In situ iSE 2018

Videos

Contact

Octavian Buiu
Octavian Buiu

Related products

Fast spectroscopic ellipsometer M-2000
Fast spectroscopic ellipsometer M-2000
The M-2000 ellipsometer combines highly accurate 'rotating compensator' method with fast CCD technology. This allows high speed measurements: min. 390 wavelengths in < 1 second. It is available as ...
Dual rotating compensator ellipsometer RC2
Dual rotating compensator ellipsometer RC2
The RC2 is the first spectroscopic ellipsometer with two rotating compensators. It combines the best features of previous instruments with innovative new technology: dual rotating compensator, ...
Economic high precision table top ellipsometer Alpha-SE
Economic high precision table top ellipsometer Alpha-SE
Spectroscopic ellipsometer Alpha-SE is a fast, low-cost system for measuring film thickness and optical constants. Everything is contained in an amazingly small package. It is the ideal table top ...
Widest spectral range ellipsometer VASE
Widest spectral range ellipsometer VASE
The VASE is our most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers and more.
Spectroscopic ellipsometer for Vacuum Ultra Violet: VUV-VASE
Spectroscopic ellipsometer for Vacuum Ultra Violet: VUV-VASE
The VUV-VASE variable angle spectroscopic ellipsometer is the standard in optical characterization of materials used in lithography applications. Its measurement range spans vacuum ultraviolet (VUV) ...
FTIR ellipsometer IR-VASE
FTIR ellipsometer IR-VASE
The IR-VASE is the first and only spectroscopic ellipsometer to cover the spectral range from 1.7 to 30 microns (333 to 5900 wavenumbers). The IR-VASE can determine both n and k for materials over the ...
Ellipsometer for texture Si solar cells T-Solar
Ellipsometer for texture Si solar cells T-Solar
T-Solar, a special intensity optimized M-2000, addresses the measurement requirements on textures Si wafer surfaces.

Contact

Quantum Design

Str Ion Nistor 4, et 1, M2E
030041 Bucharest
Romania

Phone:+40 755039900
Fax:+40 317107156
E-mail:romania@qd-europe.com
Cookie notice Cookies help us in providing our services. By using our services, you agree to the use of cookies. Privacy policy
Octavian BuiuSales Manager
+40 755 039900
buiu@qd-europe.com