Arc single crystal furnace

Tetra Arc Furnace TAC-5100J from QuantumDesign

In the Tetra Arc Furnace, high-melting-point material is melted by four electric arcs discharged in inert Argon gas. The single crystal is grown using the Czochralski method.

  • Melting temperature up to 3000 °C
  • Four electric arcs
  • Uniformly distributed high-temperature region
  • High vacuum system (5x10-6 Torr)
  • Chamber vacuum reached in less than one hour

Further information

In Tetra Arc, polycrystalline material is melted by four electric arcs in a rotating, chilled copper hearth. A chilled tungsten pulling rod is dipped into the hot melt. While rotating, the pulling rod is slowly lifted to grow the crystal. To prevent the oxidation of both melt and crystal, the entire process is performed in an oxygen- and moisture-free atmosphere.

Suitable materials crystallized by this method include intermetallic compounds that are potentially damaged by oxidization. For this purpose, the furnace includes a high vacuum system to prevent oxidization (5x 10-6 Torr).


Chamber Stainless steel (double walled and cooling water
Working pressure range 5x10-6 Torr (within 1 hour)~1.1 Atm
Vacuum discharge system Turbo molecular pump: 220 L/sec and rotary pump 100 L/min
Vacuum gage measurement range 760 Torr~1x10-9 Torr
Arc generator/Getter generator 200 A/each generator for each electrode x 5 units
Pulling shaft Shaft seal Stainless/ferro-fluidic seal and bellows
  Normal travel speed 0-39 mm/hr (servo-motor)
  Travel stroke 150 mm
  Speed stability travel ±1.0 % FS
  Rapid travel speed 175 mm/min (fix)
  Rotation speed 0-10 rpm
Hearth shaft Shaft seal Stainless /ferro-fluidic seal and bellows
  Rotation speed 0-10 rpm


Intermetallic compounds


Tetra arc furnace


Tetra Arc Furnace system, by GES Corporation

Reference customers

Single-Crystal Growth of f-Electron Intermetallics in a Tetra-Arc Czochralski Furnace, M. Szlawska and D. Kaczorowski, ACTA Physica Polonica A, Vol. 124, Page 336 (2013).


Ales Jandik
Ales Jandik


Quantum Design

Krivoklatska 37
199 00 Praha 9
Czech Republic

Phone:+420 607 014 278
Ales JandikSales Manager
+420 607 014292
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