AttoMap™ - µXRF analytical microscope


The AttoMap™ x-ray analytical microscope offers the highest resolution and the highest sensitivity one can find in a laboratory based microXRF system. The AttoMap™ system can be used for transmission-based x-ray structural analysis as well as for fluorescence chemical mapping. The system has a chemical sensitivity of <1-10 ppm for trace element analysis and the measuring time is within 1 second.

Further information

The key advantages of the AttoMap™ system compared to standard µXRF systems are three major innovations developed by Sigray.

  1. The patented FAAST™ x-ray source with 50X higher brightness than microfocus sources used in standard microXRFs
  2. Proprietary, high efficiency x-ray mirror lens that provides a combination of small achromatic focus and large working distance for superior detection sensitivity and accuracy
  3. Unique detector geometry enabled by the design of the x-ray mirror lens that collects 10X more fluorescence x-rays than conventional designs.

These innovations provide the AttoMap™ with the ultimate laboratory microXRF performance:

  • Substantially higher resolution at single digit microns-scale (e.g. 3-5 µm MTF) resolution versus conventional microXRF
    • Detectability of nanoparticles down to 50-100 nm
  • Dramatically faster analytical speed of a single minute - rather than a half day - for equivalent measurements on an AttoMap™ versus a conventional microXRF with up to 500X higher throughput
  • Sub-ppm and sub-femtogram sensitivity in seconds
    • >100X the sensitivity of standard microXRF
    • Only microXRF that can map trace elements (conventional microXRF is capable of mapping only major constituents at reasonable throughputs, as it requires long spot acquisition times for trace elements)
  • Most accurate quantification capabilities and optional dual energy source for maximum flexibility
  • Ability to analyze buried microfeatures


Parameter Specification
Spot Size High Res (<8 µm) | Med Res additional optics also available
Sensitivity Sub-ppm relative detection sensitivity and capable of mapping trace elements. Picogram to femtogram absolute sensitvity (element & acquisition time dependent)
Additional Capabilities & Modules 2D correlative x-ray imaging at <1 µm resolution included (standard)
Optical microscopy included (standard)
Future modules will be available as upgrades
Footprint 54” W x 65.5” H x 38.5” D
Maximum Sample Size 50 cm x 50 cm | 15 cm thickness
Source Sigray FAAST™ Microstructured Source
Target Material Dual Energy Option, includes selection from: Ti, Cu, Rh, W, Pt, Zr, etc. Custom target options include materials that have previously not been used in conventional sources.
Power | Voltage | Current 50 W | 20-50 kV | 4 mA
X-ray Optic Sigray Twin Paraboloidal X-ray Mirror Lens
Transmission Efficiency ~80%
Working Distance 10 - 50 mm (customizable)
Interior Coating Platinum (increases NA of optic significantly)
X-ray Detectors Two SDD detectors and an X-ray Camera
Energy Resolution <135 eV at Mn-Ka


AttoMap 200
FAAST Phase x-ray source
AppNote Analysis of trace elemental distribution in plant specimen
AppNote Metrology of 3D transistors for La/Hf, Co, Ni dopant
AppNote Quantifying tempered glass layer


Ales Jandik
Ales Jandik


Quantum Design

Krivoklatska 37
199 00 Praha 9
Czech Republic

Phone:+420 607 014 278
Ales JandikSales Manager
+420 607 014292