Zygo high resolution Fizeau interferometer

Verifire HD from Zygo

Zygo's Verifire HD interferometer provides fast high-resolution measurements of flat or spherical surfaces, and transmitted wavefront of optical systems and assemblies. Available in 4” and 6” versions, it measures glass or plastic optical components - like flats, lenses, and prisms - and even precision machined metal and ceramic surfaces. Its high lateral resolution allows to “see” a high number of fringes in the field of view enabling to characterize, wanted or not, high-slope surfaces deviations.

Features
  • True on-axis Fizeau configuration ensures accurate metrology
  • Optimized internal design to transmit high frequencies
  • Low noise fast 2304x2304 pixels camera (210 Hz) = about 1000 fringes in the FOV
  • Zygo MX software
  • Classical PSI & anti-vibration QPSI technologies + optional dynamic DynaPhase

Further information

All characteristics

  • True on-axis Fizeau configuration ensures accurate metrology
  • Optimized internal design to transmit high frequencies
  • Low noise fast 2304x2304 pixels camera (210 Hz)
    • Resolves mid-spatial frequency surface features (about 1000 fringes in the FOV)
  • Fixed 1x magnification
  • Optional CARS acquisition: Coherent Artefact Suppression and Noise Reduction
  • Zygo MX software
  • Classical PSI technology (13 buckets)
  • Anti-vibration QPSI technology (30 buckets) for production environments
  • Optional DynaPhase technology for dynamic measurements
  • Stabilized long-life proprietary laser with industry-leading reliability
  • Wired and wireless remote control
  • Available in 4” & 6” mainframes

Applications

Wafers flatness

The high capability of the Verifire HD to characterize high-slope surfaces deviations makes it very well suited to the characterization of silicon wafers.

Downloads

Verifire HD brochure

Videos

ZYGO QPSI Vibration-Tolerant Interferometry – Quick Demonstration
How to Measure the Surface of a Plano Optic with a ZYGO Laser Interferometer System
How to Measure the Transmitted Wavefront of a Plano Optic with a ZYGO Laser Interferometer
Interferometer measuring in vibration performs metrology with noise-free interferometry data
How to Use the SmartAveraging™ Feature of ZYGO's Mx™ Software
Extreme Product Testing: ZYGO Laser Interferometer Dropped from a Fork Lift!

Contact

Staffan Eriksson
Staffan Eriksson

Contact

Quantum Design GmbH

Roddarestigen 3
SE 182 35 Danderyd
Sweden

Phone:+46 8 41071791
E-mail:nordic@qd-europe.com
Staffan ErikssonSales Manager
+46 8 410 71791
Write e-mail