Interferometer WorkstationVerifire XL from Zygo
The Verifire XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.Features
- 12" (300 mm) aperture
- Compact footprint, self-contained system
- Integrated vibration isolation and QPSI technology
- Easy part loading and alignment
The Verifire XL system includes ZYGO's patented QPSI acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.