Interferometer Workstation

Verifire XL from Zygo

The Verifire XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.

  • 12" (300 mm) aperture
  • Compact footprint, self-contained system
  • Integrated vibration isolation and QPSI technology
  • Easy part loading and alignment

Further information

The Verifire XL system includes ZYGO's patented QPSI acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.


Verifire XL brochure


Staffan Eriksson
Staffan Eriksson


Quantum Design GmbH

Roddarestigen 3
SE 182 35 Danderyd

Phone:+46 8 41071791
Staffan ErikssonSales Manager
+46 8 410 71791
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