MicroWriter laser lithography system

MicroWriter is a flexible photolithography machine designed for rapid prototyping and small-volume manufacturing in R&D laboratories and small clean rooms. Conventional approaches to photolithography are usually based on exposing through a chromium-glass mask manufactured by specialist vendors. The fact that all of the wafer is exposed in parallel makes this technique fast. The alternative conventional approach is to use direct-write laser lithography, where a computer-controlled laser writes directly to the wafer. The optics required to make a direct-write machine expose quickly are extremely complicated and result either in the machine being very expensive (~€1M) or very slow (~18 hours exposure time for a single wafer).
The low-cost MicroWriter combines the flexibility of maskless direct writing with the speed of parallel exposure.

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Dr. Simone Paziani
Dr. Simone Paziani

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Quantum Design s.r.l.

Italy and Israel branch office
Via Francesco Sapori, 27
00143 Roma
Italy

Phone:+39 06 5004204
Fax:+39 06 5010389
E-mail:italy@qd-europe.com
Dr. Simone PazianiSales Director
+39 06 5004204
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