Zygo – Verifire XL Fizeau-Interferometer for large flat surfaces

The Verifire XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, blocked parts on carrier plates, and semiconductor wafers or wafer chucks.
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation, requires minimal production floor space. It includes Zygo's patented QPSI acquisition technology which enables reliable high-precision measurements in the presence of vibration. The high-performance transmission flat in the system is designed for minimal sensitivity to gravitational sag, and includes a full-area calibration file to enable optimum system accuracy.
Zygo's proprietary Mx measurement and analysis software offers a wide range of operational features and data visualization tools for unmatched measurement capability in an easy-to-use interface. Region analysis allows detailed evaluation of single blocked parts for surface quality and angle error.

Key features

  • 12" (300 mm) aperture
  • Compact footprint, self-contained system
  • Easy part loading and alignment
  • Simple setup and streamlined operation
  • Built-in pre-aligned transmission flat
  • Integrated vibration isolation and QPSI technology for reliable measurements in production environments

Moe about interferometers

Contact

Ing. Alessandro Baratti
Ing. Alessandro Baratti

Register

Newsletter registration

Contact

Quantum Design s.r.l.

Italy and Israel branch office
Via Francesco Sapori, 27
00143 Roma
Italy

Phone:+39 06 5004204
Fax:+39 06 5010389
E-mail:italy@qd-europe.com
Ing. Alessandro BarattiProduct Manager
+39 06 5004204
Write e-mail