SEM/XRF: X-Ray Fluorescence for Scanning Electron Microscopes
from IXRF SystemsWith iXRF's microXRF systems you will be able to achieve unique analytical capabilities for your SEM scanning electron microscope.
In fact, thanks to the interaction of X-rays with your sample you will be able to increase the signal-to-noise ratio allowing you to achieve higher sensitivity for higher Z elements: sensitivity that exceeds electron beam excitation by a factor of 10-1000.
Exceptional beam stability, together with the modern SDD X-ray detector, will allow you greater sensitivity to trace elements down to the level of a few ppm. In addition, nonconductive materials will also be able to be analyzed without any special preparation or coating.
The iXRF systems can be integrated in all SEMs on the market today to provide you with complete elemental analysis through the simultaneous use of the electron beam and X-ray source.
All aided by the powerful IRIDIUM ULTRA software, capable of handling analysis quickly and easily.
- Wide target’s materials choice
- Accelerating voltage up to 50kV
- Beam current up to 1mA
- Spot size ranging from 10 µm to 25mm
- Patented polycapillary optics
- Trace elements detection up to 10ppm
- Air cooled systems
- High precision Piezo Stage
- Free and easy to use software with more than 60 analysis tools included
Further information
The advantages of X-ray interaction in SEMs
Electron beams generated in SEMs produce a very high background. This, hides the presence of trace elements in the samples. In contrast, direct X-ray excitation produced by a real X-ray source does not suffer from this effect. It will then be possible to easily identify and quantify elements contained in a few ppm and even produce X-ray maps for elements present in trace and to visualize their distribution in the sample. For elements greater than Na, for example, the limits may be less than 10 ppm.
iXRF has two solutions for X-ray production that can be integrated into the SEM: Xb SEM™ and ƒX SEM™.
Xb SEM™: high-end system
The compact design and slid-mounting of Xb SEM™ allow very close coupling to the sample. Thanks to the patented polycapillary optics, you will be able to achieve spot size on the sample as small as 10µm.
The Xb SEM™ has a built-in high-voltage power supply that allows you to reach a maximum power of 50 watts (35-50 kV and 1.0 mA depending on the anode material), which due to the excellent coupling with the sample provides XRF analytical results comparable to those of conventional "benchtop" or "mainframe" XRF instruments. An additional advantage lies in the design of the SEM™ Xb X-ray source, which is designed so that it does not interfere with the normal operation of the SEM, allowing the electron beam and X-ray to be used on the same region of interest and at the same time, so that data on all elements can be collected simultaneously.
ƒX SEM™: low-cost system
IXRF's ƒX SEM™ is an affordable, air-cooled X-ray source designed exclusively for use on electron microscopes SEMs. Due to its compact design and slid-mounting, a very tight coupling with the sample can be achieved. This unique design delivers "high-flux" X-rays to small or even large areas of excitation on the sample surface. In fact, ƒX SEM™ provides excitation spots ranging from 500 µm up to 25 mm.
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Quantum Design s.r.l.
Italy and Israel branch office
Via Francesco Sapori, 27
00143 Roma
Italy
| Phone: | +39 06 5004204 |
| Fax: | +39 06 5010389 |
| E-mail: | italy@qd-europe.com |
