Our partner Sigray

Apex XCT – ultrafast sub-micron CT for semiconductor applications

from SIGRAY

Our partner Sigray developed the Apex XCT-150 to overcome common problems with ct measurements of typical semicon samples like wafers or graphic cards such as long scanning times and image artifacts. The Apex XCT-150 is able to get comparable results in minutes instead of many hours compared to traditional ct measurements.

Features
  • 3D imaging on intact samples up to 300 mm diameter
  • 0.5 µm 3D spatial resolution in <15 minutes
  • no beam hardening artifacts

Further information

Computer Tomography is used since the early 2000 to get true 3D information with resolutions down to 1 µm without destroying the sample. However, there are several common problems with traditional ct system when measuring typical semicon samples like complete boards, wafers and PCBs. Those type of samples require very long measuring times and the results will often struggle with image artifacts such as beam hardening, streaking/curtaining, photon starvation and metal artifacts. The Apex XCT-150 overcomes these problems due to its unique and patented architecture.

Elemination of image artifacts

Apex XCT eliminates many of the imaging artifacts that affect operation of conventional 3D X-ray systems, such as beam hardening, streaking/curtaining, photon starvation, and metal artifacts. Compare the same region imaged with Apex XCT (Left) and a leading Conventional XRM/microCT (Right) – the Apex XCT result demonstrates a dramatic increase in image quality while also offering a significantly reduced scan time.

Specifications

Technical Specifications of the Apex XCT-150
  Parameter Specification
Overall Spatial Resolution 0.5 μm
Minimum Voxel 70 nm
Source Type Nanofocus Sealed Tube Transmission X-Ray Source
Voltage 30 - 160 kVp
Power 25 W
Target(s) Tungsten
Detector(s) Type 6.7 MP 50 micron pixel size 9 FPS 14x11 cm
(Upgrade) 26.9 MP 50 micron pixel 22 fps 28x24 cm
Visible Light Camera 16MP alignment camera
Software Command and Control Sigray 3D with Intuitive interface
Reconstruction GigaRecon - fastest commercial CBCT reconstruction software
Continuous (or Fly) Scan Data Acquisition Standard
Sample Handling Robot Queue up to 20 samples without operator interventon
Linux Workstation Interface is on a Windows workstation, while a separate robust Linux workstation controls the system.
Advantageous for reliable 24-7 operation.
EPICS Open-source software controls for maximum flexibility
Dimensions Footprint 224 cm L x 125 cm W x 234 cm H
Sample Size 300 mm diameter x 25 mm height

Downloads

Apex XCT
AppNote Montage imaging of large fields of fiew
In Situ X-ray Approaches in Battery Research

Videos

High-resolution scan of an entire board

Contact

Dr. Andreas Bergner
Dr. Andreas Bergner

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Contact

Quantum Design AG

Route du Roule 41
CH-1723 Marly
Switzerland

Phone:+41 21 8699-033
E-Mail:suisse@qd-europe.com
Dr. Andreas BergnerProduct Manager - Electron microscopy & nanotechnology
+49 6157 80710-12
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