Sputter-Targets / Materials
By cathode sputtering (sputtering) samples or substrates can be coated with a wide variety of metals / metal alloys or electrically conductive materials. The coating material is referred to as a sputtering target.
- Targets for all current Quorum sputter coaters
- Disc targets (Ø 57 mm) also for older Quorum/Emitech/Polaron/… coaters
- High-purity metals / alloys
- Wide range of materials
- Other materials and sizes on request
Specifications
| Disk Targets (Ø 57 mm) |
|---|
| Suited for : E5000 / E5200 / E5400/ SC502/ SC7610 / SC7620 / Q150R (S/ES) Plus / Q150T (S/ES) Plus / Q150V (S/ES) Plus / Q300T(D/T) Plus* / K5 75X(XD*) / K675X(XD)* / SC3000 |
| Gold / (Au) |
| Gold/Palladium (80% / 20%) / (Au / Pd) |
| Gold/Palladium (60% / 40%) / (Au / Pd) |
| Platinum / (Pt) |
| Platinum/Palladium (80%/20%) / (Pt / Pd) |
| Palladium / (Pd) |
| Silver / (Ag) |
| Copper / (Cu) |
| Nickel / (Ni) |
| Disk Targets (Ø 57mm) for high vacuum sputter coaters |
|---|
| Suited for : Q150T (S/ES) Plus / Q150V (S/ES) Plus / Q300T(D/T) Plus* / K575X(XD*) / K675X(XD)* / SC3000 |
| Aluminium / (Al) |
| Carbon / (C) |
| Chromium / (Cr) |
| Cobalt / (Co) |
| Indium Tin Oxid (ITO) |
| Iridium / (Ir) |
| Iron / (Fe) |
| Magnesium / (Mg) |
| Molybdenumn / (Mo) |
| Wolfram / (W) |
| Titanium / (Ti) |
| Tantalum / (Ta) |
| Tin / (Sn) |
Other materials, diameter and thicknesses on request
*These machines need 2 different or 3 targets of the same kind.
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Quantum Design AG
Route du Roule 41
CH-1723 Marly
Switzerland
| Phone: | +41 21 8699-033 |
| E-Mail: | suisse@qd-europe.com |
