Production Ready 3D Optical Profiler

ZeGage Pro from Zygo
The ZeGage Pro and ZeGage Pro HR 3D optical profilers provide non-contact measurement and characterization of micro and nano-scale features of virtually any surface, and set the new standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers. Features
  • Vibration-resistant, for metrology and process control on the production floor
  • ISO 25178-compliant results ensure confidence in your metrology
  • Non-contact, area-based metrology technique prevents part damage and is insensitive to part lay
  • Measurements require no consumables

Further information

The base ZeGage Pro model delivers surface mapping at the nanometer scale, meeting the needs for most industrial surfaces. For smoother samples, with a much finer surface finish, the ZeGage Pro HR offers more than 20X higher precision with 0.15 nm vertical precision.



ZeGage Pro et Pro HR brochure


Martin Klecka
Martin Klecka


Quantum Design

Krivoklatska 37
199 00 Praha 9
Czech Republic

Phone:+420 607 014 278
Martin KleckaSales Manager
+420 607 014278