3D Profilo-Rugosimeters ZeGage Pro & Pro HR

from Zygo

The ZeGage Pro and ZeGage Pro HR are 3D optical profilers providing non-contact measurements and characterization of any surface. Those CSI microscopes bring nano-scale and sub-nano vertical resolution. They are said to be “metrological” instruments thanks to interferometry that gives the same vertical resolution for any magnification of the lens in use. Zegage Pro and ZeGage Pro HR are the  new standard for performances, ease of use, flexibility and precision of benchtop-class industrial non-contact surface profilers.

  • Vibration-resistant, for metrology and process control on the production floor
  • Ease of use with 1 button acquisition help
  • Nano & sub-nano vertical resolution
  • ISO 25178-compliant results ensure confidence in your metrology
  • Non-contact metrology technic prevents part damage

Further information

ZeGage Pro and Pro HR can get the motorized XY stage to allow automatization: patterning and stitching to get wide field of view and high lateral resolution at the same time.


  • High vertical resolution:
    • ZeGage Pro = 3,5 nm
    • ZeGage Pro HR = 0,15 nm
  • Wide Field of View with 1600x1200 pixels camera
  • Max. measurable topography height: 20 mm (with appropriate objective)
  • 1 button acquisition help with fast autofocus, autolight, autoscan range
  • Motorized Z stage : 100 mm
  • optional motorized XY : 100x100 mm (stitching, patterning)
  • Large choice of standard lenses: 1X to 50X
  • Choice of Long (20 mm) and Super Long (40 mm) Working Distance lenses
  • Measurements require no consumables


ZeGage Pro et Pro HR brochure


SureScan™ Vibration-Tolerant Technology on a ZYGO ZeGage™ Plus 3D Optical Profiler


Martin Klecka
Martin Klecka


Quantum Design

Krivoklatska 37
199 00 Praha 9
Czech Republic

Phone:+420 607 014 278
Martin KleckaSales Manager
+420 607 014278
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