MicroWriter laser lithography system

MicroWriter is a flexible photolithography machine designed for rapid prototyping and small-volume manufacturing in R&D laboratories and small clean rooms. Conventional approaches to photolithography are usually based on exposing through a chromium-glass mask manufactured by specialist vendors. The fact that all of the wafer is exposed in parallel makes this technique fast. The alternative conventional approach is to use direct-write laser lithography, where a computer-controlled laser writes directly to the wafer. The optics required to make a direct-write machine expose quickly are extremely complicated and result either in the machine being very expensive (~€1M) or very slow (~18 hours exposure time for a single wafer).
The low-cost MicroWriter combines the flexibility of maskless direct writing with the speed of parallel exposure.

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Nicolas Tcherbak
Nicolas Tcherbak

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Quantum Design S.A.R.L.

1 avenue de l’Atlantique
Bâtiment Mac Kinley
91940 Les Ulis
France

Phone:+33 1 69 19 49 49
Fax:+33 1 69 19 49 30
E-mail:france@qd-europe.com
Nicolas TcherbakSales Director
01 69 19 49 49
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