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Zygo high resolution Fizeau interferometer

Verifire HD from Zygo

Zygo's Verifire HD interferometer provides fast high-resolution measurements of flat or spherical surfaces, and transmitted wavefront of optical systems and assemblies. Available in 4” and 6” versions, it measures glass or plastic optical components - like flats, lenses, and prisms - and even precision machined metal and ceramic surfaces. Its high lateral resolution allows to “see” a high number of fringes in the field of view enabling to characterize, wanted or not, high-slope surfaces deviations.

Features

True on-axis Fizeau configuration ensures accurate metrology
Optimized internal design to transmit high frequencies
Low noise fast 2304x2304 pixels camera (210 Hz) = about 1000 fringes in the FOV
Zygo MX software
Classical PSI & anti-vibration QPSI technologies + optional dynamic DynaPhase

Further information

All characteristics

True on-axis Fizeau configuration ensures accurate metrology
Optimized internal design to transmit high frequencies
Low noise fast 2304x2304 pixels camera (210 Hz)
- Resolves mid-spatial frequency surface features (about 1000 fringes in the FOV)
Fixed 1x magnification
Optional CARS acquisition: Coherent Artefact Suppression and Noise Reduction
Zygo MX software
Classical PSI technology (13 buckets)
Anti-vibration QPSI technology (30 buckets) for production environments
Optional DynaPhase technology for dynamic measurements
Stabilized long-life proprietary laser with industry-leading reliability
Wired and wireless remote control
Available in 4” & 6” mainframes

Applications

Wafers flatness

The high capability of the Verifire HD to characterize high-slope surfaces deviations makes it very well suited to the characterization of silicon wafers.