Interferometer Workstation

Verifire XL from Zygo

The Verifire XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.

Features
  • 12" (300 mm) aperture
  • Compact footprint, self-contained system
  • Integrated vibration isolation and QPSI technology
  • Easy part loading and alignment

Further information

The Verifire XL system includes ZYGO's patented QPSI acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.

Downloads

Verifire XL brochure

Contact

Xavier Boira
Xavier Boira

Contact

Quantum Design

Roca i Roca, 45
08226 Terrassa (Barcelona)
Spain

Phone:+34 937 349168
Fax:+34 937 349168
E-mail:iberiaqd-europe.com
Xavier BoiraSales Manager
+34 937 349168
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