Interferometer Workstation
Verifire XL from ZygoThe Verifire XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.
- 12" (300 mm) aperture
- Compact footprint, self-contained system
- Integrated vibration isolation and QPSI technology
- Easy part loading and alignment
Further information
The Verifire XL system includes ZYGO's patented QPSI acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.
Downloads
Contact
Xavier
Boira
Navigation
Categories
Contact
Quantum Design
Roca i Roca, 45
08226 Terrassa (Barcelona)
Spain
Phone: | +34 937 349168 |
Fax: | +34 937 349168 |
E-mail: | iberiaqd-europe.com |