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Zygo 3D Profilo-Rugosimeter NeXview 650

from Zygo

The Nexview™ 650 metrology system is an inspection tool for automated measurement of injection molding tooling, PCBs, glass panels and other samples requiring an extended work volume up to 650 x 650 mm. It provides 2D & 3D measurements of a variety of surface features with sub-nanometer vertical precision and sub-micron lateral precision.

Features

Stage 650x650 mm
Sub-nano vertical resolution
Fully automated : XYZ, Tip&Tilt, zoom, objectives turret, filters, aperture …
Gage capable performance - exceptional precision and repeatability for the most demanding production applications
ISO 25178-compliant results ensure confidence in your metrology

Further information

Coherence Scanning Interferometry (CSI) is the measurement technology at the core of the NeXview™ 650 system like other Zygo profile-rugosimeters ZeGage Pro, NEwView 9000 and NeXview NX2. This non-contact technique provides high-precision, and high-value surface metrology benefits. This CSI microscope bring sub-nano vertical resolution. Like NeXview NX2, NewView 9000 and ZeGage Pro, it is said to be “metrological” instrument thanks to interferometry that gives the same vertical resolution for any magnification of the lens in use. This fully automated system is easy to use, fast to measure a wide range of surface types, including smooth, rough, flat, sloped, and stepped ones. All measurements are nondestructive, fast, and require no sample preparation.

Fully automated:
- motorized XY: 650x650 mm
- motorized Z: 150 mm
- motorized Tip&Tilt: +/- 4°
- motorized 3 position zoom (0,5x / 1x / 2x)
- motorized 4 positions objectives turret
- stitching & patterning
- autofocus, autolight, autoscan range
- automatization of filters, field-stop, aperture-stop
High vertical resolution: 0,12 nm
High accuracy: 0,3%
High repeatability: 0,1%
Wide Field of View with 1600x1200 pixels camera
Vibration-resistant, for metrology and process control on the production floor
ISO 25178-compliant results ensure confidence on your metrology
Non-contact metrology technic prevents part damage
No consumable
Large choice of standard lenses: 1X to 100X
Choice of Long (20 mm) and Super Long (40 mm) Working Distance lenses
SureScan™ vibration tolerance technology - robust operation in virtually any environment
Mx™ software enables seamless data exchange with other Zygo profilers including ZeGage™ Pro, NewView™ 9000, and NeXview™ NX2