MicroWriter laser lithography system

MicroWriter is a flexible photolithography machine designed for rapid prototyping and small-volume manufacturing in R&D laboratories and small clean rooms. Conventional approaches to photolithography are usually based on exposing through a chromium-glass mask manufactured by specialist vendors. The fact that all of the wafer is exposed in parallel makes this technique fast. The alternative conventional approach is to use direct-write laser lithography, where a computer-controlled laser writes directly to the wafer. The optics required to make a direct-write machine expose quickly are extremely complicated and result either in the machine being very expensive (~€1M) or very slow (~18 hours exposure time for a single wafer).
The low-cost MicroWriter combines the flexibility of maskless direct writing with the speed of parallel exposure.

More about the laser lithography system MicroWriter

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Staffan Eriksson
Staffan Eriksson

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Quantum Design GmbH

Roddarestigen 3
SE 182 35 Danderyd
Sweden

Phone:+46 8 41071791
E-mail:nordic@qd-europe.com
Staffan ErikssonSales Manager
+46 8 410 71791
eriksson@qd-europe.com