Our partner Woollam

Fast Mapping theta-SE

From Woollam Co.

The theta-SE is a push-button spectroscopic ellipsometer for characterizing thin film uniformity. It features advanced ellipsometry instrumentation in a compact package at an affordable price.

Features
  • Fully integrated
  • High Speed
  • Compact
  • User Friendly
  • Affordable

Further information

The theta-SE comes equipped with 300mm sample mapping, small-spot measurement beam, fast automated sample alignment, look-down camera and our latest Dual-Rotating ellipsometer technology. The theta-SE has everything you need to measure spatial uniformity of your film thickness and optical properties.

Specifications

  • Spectral range: 400 to 1000nm
  • Number of wavelengths (measured simultaneously): 190
  • Detector: CCD
  • Spot size: 250 x 600µm (on sample)
  • Data Acquisition Rate (per measurement spot, entire spectrum): 0.3 sec (fastest), 1-2 sec (typical)
  • Angel of incidence: 65°
  • Data Types: Spectroscopic ellipsometry and advanced g-SE or Mueller Matrix-SE

Applications

Optical constants of layers
Thickness of thin films
Homogeneity thickness profile

Downloads

theta-SE brochure
Spectroscopic ellipsometers product overview

Contact

Quantum Design

Krivoklatska 37
199 00 Praha 9
Czech Republic

Phone:+420 607 014 278
E-mail:czechiaqd-europe.com