Strategy to allow fast prototyping with increased lithography resolution at the Universitat Politècnica de València
Valencia, Spain, and Darmstadt, Germany (May 23, 2022) – UPVfab, the microfabrication facility at the Universitat Politècnica de València, has acquired a direct-write photo lithography system (MicroWriter 3 Pro) supplied by Quantum Design GmbH (QD), to complete the lithography line. The new equipment was funded by the regional government Generalitat Valenciana through project GVA/IDIFEDER/2021/046 “Multi-level Microfabrication Technologies (T-MFAB-MN)” as part of a strategy to equip the facility for micro-fabrication in the technical disciplines of photonics, electronics, and chemical engineering.
“The MicroWriter 3 Pro tool is part of UPVfab’s strategy to allow fast prototyping with increased lithography resolution,” said Dr. Gloria Micó, Facility Manager for UPVfab. “Companies with designs in mind won’t have to wait for hard masks, the MicroWriter 3 Pro allows transferring directly GDS to substrates, ranging from small pieces to wafers up to 8’’ / 200 mm, and resolutions selectable from 0.4 to 5.0 µm.”
QD’s direct-write photo lithography product line offers everything you need for high resolution combined with fast processing. “This UPVfab installation is the third installation within the last years said Xavier Boira, QD’s Regional Sales Manager Iberia. “QD is happy to equip UPVfab with his latest development, the MicroWriter 3 Pro model with cutting-edge 0.4 µm resolution and the unique dual-wavelength setup. We believe that UPVfab is the perfect partner in Spain for the first installation of our most powerful lithography system” said Dr. Andreas Bergner QD´s European Division Manager Lithography.
UPVfab’s resident company program established in 2021. “The programme is devised so infrastructure automation and personnel are ready to support industrial R&D, prototyping, and small series manufacturing, besides the establishment of demo sites in the cleanroom,” said Prof. Pascual Muñoz, Director for UPVfab.
UPVfab is the micro-fabrication R&D and pilot line facility at Universitat Politècnica de València. The facility comprises 500m2 cleanrooms ISO-7 (class 10.000) and positions to serve with automation tools for backend processing of semiconductor wafers.
About Quantum Design GmbH
For more than 50 years, Quantum Design Europe has been one of the leading distributors of high-tech systems and components for research and industry. With 120 employees in 20 European countries, we offer the broadest selection with an exciting mix of suppliers from long-established corporations on the one hand and innovative start-up companies on the other.
For more information, contact:
Dr. Gloria Micó
Facility Manager, UPVfab Microfabrication Facility,
Universitat Politècnica de València
+34.963.879.760 – gloria.micoupv.es