Desktop Scanning Electron Microscope for Large and Multiple Samples – ONYX
NANOS ONYX by SemplorThe ONYX by Semplor is a high-resolution tabletop scanning electron microscope designed for larger components and multiple samples. Its 110 × 110 mm motorized stage and 220 × 220 mm sample chamber provide increased flexibility for workflows that require more sample capacity than a conventional compact desktop SEM. The system supports up to 16 one-inch or 64 half-inch sample stubs and accommodates samples up to 50 mm in height. High-resolution SEM imaging with secondary and backscattered electron detection is complemented by elemental analysis with EDS.
- SEM resolution < 8 nm and magnification from 100x to 200,000x
- 110 × 110 mm motorized XY stage for larger components and multiple samples
- 220 × 220 mm sample chamber with support for samples up to 50 mm in height
- Capacity for up to 16 one-inch or 64 half-inch SEM sample stubs
- Secondary electron and four-quadrant backscattered electron detection for surface and compositional imaging
- EDS analysis with point analysis, line scans and elemental mapping
Further information
Large Stage for Larger and Multiple Samples
The ONYX is designed around a 110 × 110 mm motorized XY stage and a 220 × 220 mm sample chamber, providing substantially more space for larger components and multi-sample setups than the compact NANOS platform. Samples up to 50 mm in height can be accommodated.
The stage can hold up to 16 one-inch SEM sample stubs or up to 64 half-inch stubs in a single setup. This allows multiple samples to be loaded and analyzed without repeated sample exchange and also supports larger specimens, including semiconductor-type samples where the geometry is suitable.
ONYX sample stage loaded with 64 half-inch SEM sample stubs.
ONYX sample stage loaded with 16 one-inch SEM sample stubs.
High-Resolution Imaging and Contrast Modes
The ONYX combines high-resolution SEM imaging with secondary electron and four-quadrant backscattered electron detection. Secondary electron imaging provides detailed information about surface morphology, while backscattered electron imaging adds compositional contrast. Both signals can also be viewed in mixed mode to compare surface structure and material differences within the same area.
SE image showing surface topography of a dental drill bit.
BSE image showing compositional contrast of the same dental drill bit.
Low-vacuum imaging supports the examination of non-conductive samples by reducing charging effects. The system also supports low-beam imaging down to 1 kV and a topographical mode for enhanced visualization of surface relief.
Embedded EDS with Discover EDS
In the EDS configuration, the ONYX extends SEM imaging with elemental analysis using a thermoelectrically cooled silicon drift detector. Point analysis, line scans and elemental mapping provide spatially resolved information about the elemental composition of the sample. The current ONYX documentation specifies a 30 mm² detector area, an energy resolution of <129 eV at Mn Kα and a maximum input count rate of 300,000 cps.
Discover EDS integrates acquisition, elemental analysis and reporting within the Semplor software environment. Functions include live mapping, element identification and quantification, map blending, line-scan analysis and report generation, allowing SEM imaging and EDS results to be managed within the same workflow.
Elemental mapping with Discover EDS.
Element identification and quantification with Discover EDS.
Optional Semplor Explore Apps
The optional Semplor Explore Apps extend standard SEM imaging with additional tools for particle, fiber and 3D analysis. The modules are integrated into the ONYX software environment, allowing advanced material characterization without leaving the normal SEM workflow.
Explore Particles detects and measures particles, pores and grains and provides size, shape and count data. Explore Fibers analyzes parameters such as fiber diameter, orientation and curvature, including overlapping fibers. Explore 3D generates three-dimensional reconstructions and height maps from stereo-pair, four-quadrant BSE or single-image data for visual and quantitative surface analysis.
Particle analysis with Semplor Explore Particles.
Fiber analysis with Semplor Explore Fibers.
3D reconstruction with Explore 3D.
Vacuum Control and System Integration
The ONYX supports both high-vacuum and low-vacuum SEM operation. Vacuum levels are controlled through the user interface, with low-vacuum operation available down to 40 Pa to reduce charging when examining non-conductive samples. The vacuum system combines a turbomolecular pump with an oil-free membrane pre-vacuum pump.
Electrical and fluid feedthroughs provide additional flexibility for experimental setups. The system also supports network and USB connectivity as well as remote control and diagnostics. Communication, imaging and analysis are operated from a single workstation environment.
Specifications
Imaging and Electron Optics
| Optical magnification | 0.7x and 2.5x, up to 12.5x |
|---|---|
| SEM magnification | 100x–200,000x |
| SEM resolution | < 8 nm |
| Capture resolution | Up to 4096 × 4096 pixels |
| Light optical imaging | Bright field |
| Electron source | Optimized thermionic tungsten source |
| Acceleration voltages | 1, 2, 5, 7, 10, 15 and 20 kV |
| Detectors | Secondary electron detector (SE), four-quadrant backscattered electron detector (BSE) |
Sample Stage and Chamber
| Motorized XY travel | 110 × 110 mm |
|---|---|
| Maximum sample height | Up to 50 mm |
| Sample capacity | Up to 16 × 1" stubs or 64 × 1/2" stubs |
| Feedthroughs | Electrical and fluid |
| Vacuum chamber | 220 × 220 mm |
EDS Specifications
| Detector | Thermoelectrically cooled silicon drift detector (SDD) |
|---|---|
| Active area | 30 mm² |
| Energy resolution | < 129 eV at Mn Kα |
| Maximum input count rate | 300,000 cps |
| Take-off angle | 30° |
| Analysis modes | Point analysis, line analysis and mapping |
| Integration | Fully embedded SDD, pulse processor and scan generator |
| Software | Reporting and export functions |
Vacuum and System
| System dimensions | 420 × 605 × 625 mm (W × D × H) |
|---|---|
| Weight | 95 kg |
| Vacuum pumps | Pfeiffer turbomolecular pump and oil-free membrane pre-vacuum pump |
| High vacuum | Standard |
| Low vacuum | Standard, 40 Pa |
| Workstation | Pre-configured PC with 27" monitor |
| Connectivity | Network and USB; remote control and diagnostics supported |
Ambient Conditions and Power
| Operating temperature | 15–25 °C |
|---|---|
| Relative humidity | 20–80 % RH |
| Maximum installation altitude | Up to 2000 m |
| Typical power consumption | 110 W |
| Maximum power consumption | 140 W |
Applications
The ONYX is suited to applications in research and development, industrial laboratories, and research and education where high-resolution SEM imaging, elemental analysis and flexible sample handling are required. Its large stage and chamber make the system particularly useful for larger specimens, multiple samples and repeated measurement workflows.
Typical application examples shown for ONYX include:
- Battery and energy materials, such as LiCoO₂ particles
- Metals and mineralogical samples, including mining ore and iron ore cross-sections
- Semiconductor and electronic components
- Tools and manufactured components, such as dental drill bits
- Fibers and non-woven materials
- High-resolution imaging of fine structures, such as holey carbon grids
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Quantum Design SA
Rue du Nord3
CH-1400 Yverdon-les-Bains
Switzerland
| Phone: | +41 21 8699-033 |
| E-Mail: | suisse@qd-europe.com |
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