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Interferometer Workstation

Verifire XL from Zygo

The Verifire XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.

Features

12" (300 mm) aperture
Compact footprint, self-contained system
Integrated vibration isolation and QPSI technology
Easy part loading and alignment

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Further information

The Verifire XL system includes ZYGO's patented QPSI acquisition technology which enables reliable high-precision measurements in the presence of vibration. QPSI enables true on-axis surface form metrology, without degradation from typical production vibrations.