PTB-Seminar on VUV and EUV Metrology

The PTB-Seminar is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover the latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nanostructured surfaces.

Jennifer Kraus will present our range of detectors for modular spectroscopy.