To complete the lithography line of its microfabrication facility UPVfab, the Spanish University "Universitat Politècnica de València" has acquired a MicroWriter 3 Pro direct-write photolithography system. The microfabrication line includes 500 m2 of ISO-7 clean rooms (class 10 000) and positions equipped with automation tools for backend processing of semiconductor wafers. As part of a strategy to equip the microfabrication facility in the technical disciplines of photonics, electronics and chemical engineering, the new equipment has been funded by the Regional Government Generalitat Valenciana, within the framework of the project GVA/IDIFEDER/2021/046 "Multi-level Microfabrication Technologies (T-MFAB-MN)".

For further information, please contact:

UPVfab

• Dr. Gloria Micó
• Facility Manager, UPVfab
• Microfabrication Facility,
• Universitat Politècnica de València
• Phone: +34.963.879.760
• Mail: gloria.mico@upv.es  
• https://www.fab.upv.es/

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