The Flexus film tension measuring devices from Toho Technology impress with their longevity - many systems have been in use for over 20 years. Regular maintenance and annual recalibration are crucial for this.
Calibration with a certified standard ensures precise measurement results, ISO conformity and extends the service life. Vibrations, frequent use or changes of location can affect the laser alignment - both lasers should therefore be checked annually. From the age of five years, we also recommend replacing the rubber bushings to ensure movement accuracy.
These points should be checked once a year – many of them can be carried out by the user:

Calibration and mechanics:

• Voltage test with certified wafer pair (tolerance < 5 %)
• Function test with wafer voltage pair
• Mirror radius control with certified mirror set (tolerance < 5 %)
• Checking the flat value (target value > 3000 m)

System and components:

• Visual inspection inside and outside
• Checking all connections (gas, electricity, air)
• Checking accessories, cables and circuit boards
• Voltage test of the amplifier card
• Test of the laser safety interlock
• Measurement of the power supply voltage

Software and function:

System startup check
Installation of available software updates
Adjusting and updating the calibration coefficients
Software diagnostics

Optics and care:

• Testing laser intensity and alignment
• Cleaning and lubricating the translation platform
• Replacement of laser and rubber bushes if required
• A wafer voltage pair and a calibration mirror set are suitable for self-testing. Spare parts such as lasers, ribbon cables or sockets are available on request.

This maintenance routine ensures that your Flexus system remains precise and reliable over the long term.

More about FLX Flexus thin film stress measurement systems