Zygo high resolution Fizeau interferometer
Verifire HD from ZygoZygo's Verifire HD interferometer provides fast high-resolution measurements of flat or spherical surfaces, and transmitted wavefront of optical systems and assemblies. Available in 4” and 6” versions, it measures glass or plastic optical components - like flats, lenses, and prisms - and even precision machined metal and ceramic surfaces. Its high lateral resolution allows to “see” a high number of fringes in the field of view enabling to characterize, wanted or not, high-slope surfaces deviations.
- True on-axis Fizeau configuration ensures accurate metrology
- Optimized internal design to transmit high frequencies
- Low noise fast 2304x2304 pixels camera (210 Hz) = about 1000 fringes in the FOV
- Zygo MX software
- Classical PSI & anti-vibration QPSI technologies + optional dynamic DynaPhase
Further information
All characteristics
- True on-axis Fizeau configuration ensures accurate metrology
- Optimized internal design to transmit high frequencies
- Low noise fast 2304x2304 pixels camera (210 Hz)
- Resolves mid-spatial frequency surface features (about 1000 fringes in the FOV)
- Fixed 1x magnification
- Optional CARS acquisition: Coherent Artefact Suppression and Noise Reduction
- Zygo MX software
- Classical PSI technology (13 buckets)
- Anti-vibration QPSI technology (30 buckets) for production environments
- Optional DynaPhase technology for dynamic measurements
- Stabilized long-life proprietary laser with industry-leading reliability
- Wired and wireless remote control
- Available in 4” & 6” mainframes
Applications
The high capability of the Verifire HD to characterize high-slope surfaces deviations makes it very well suited to the characterization of silicon wafers.
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Quantum Design
Roca i Roca, 45
08226 Terrassa (Barcelona)
Spain
Phone: | +34 937 349168 |
Fax: | +34 937 349168 |
E-mail: | iberiaqd-europe.com |