Fast spectroscopic ellipsometer M-2000
From Woollam Co.The M-2000 ellipsometer combines highly accurate 'rotating compensator' method with fast CCD technology. This allows high speed measurements: min. 390 wavelengths in < 1 second. It is available as ex-situ and in-situ setup.
- Ex-situ, in-situ, or inline
- Rotating compensator ellipsometer
- Modular design with variety of options and configurations
- Maximum spectral range 193 to 1690 nm
- Fully automated
Further information
The M-2000 utilizes our patented rotating compensator ellipsometer (RCE) technology to achieve high accuracy and precision. The RCE design is compatible with advanced CCD detection to measure ALL wavelengths simultaneously. This ellipsometer collects over 700 wavelengths from the ultraviolet to the near-infrared. With modular optical design, the M-2000 can be attached directly to your process chamber or configured on any of our table-top bases. Advanced design ensures accurate ellipsometry measurements for any sample and includes measurement features like Generalized Ellipsometry, Mueller matrix, and depolarisation.
Specifications
Available spectral ranges
- M-2000V: 370 to 1000 nm (390 wavelengths)
- M-2000U/X: 245 to 1000 nm (470 wavelengths)
- M-2000D: 193 to 1000 nm (500 wavelengths)
- NIR extension: 1010 to 1690 nm (200 wavelengths)
Available options
- NIR extension
- NIR diode array extends spectral range of models "V", "U/X" and "D" to 1690 nm with additional 200 wavelenghts, 1000 nm to 1690 nm
Available ex-situ stages
- Single angle stage, horizontal sample mount: 65°
- Computer controlled angle of incidence goniometer, vertikale (20 to 90°) or horizontal (45 to 90°) sample mount
In-situ package
Included UHV windows to mount to UHV chambers, tilt units, and mounting elements for 2" vacuum flanges
Automated sample translation
- 100 mm x 100 mm XY (only horizontal sample mount)
- 200 mm x 200 mm XY (only horizontal sample mount)
- 300 mm x 300 mm XY (only horizontal sample mount)
Manual sample translation
- 50 mm x 50 mm XY (only horizontal sample mount)
- 100 mm x 100 mm XY (only horizontal sample mount)
Focusing
- Attachable focusing probes to achieve spot size of 150 to 300 µm (depending on model)
- For collimated beam measurements, the focusing probes can easily be removed
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Quantum Design S.A.R.L.
Avenue de l’Atlantique
Bâtiment Fuji Yama
91940 Les Ulis
France
| Phone: | +33 1 69 19 49 49 |
| E-mail: | franceqd-europe.com |
