Four à arc pour la production de monocristaux
Four tetra-arc TAC-5100J de Quantum DesignDans le four Tetra Arc, le matériau à point de fusion élevé est fondu par quatre arcs électriques déchargés dans un gaz inerte, l'argon. Le monocristal est élaboré selon la méthode de Czochralski.
- Température de fusion jusqu'à 3000 °C
- Quatre arcs électriques
- Région à haute température uniformément répartie
- Système à vide poussé (5x10-6 Torr)
- Vide de la chambre atteint en moins d'une heure
Plus d'informations
In Tetra Arc, polycrystalline material is melted by four electric arcs in a rotating, chilled copper hearth. A chilled tungsten pulling rod is dipped into the hot melt. While rotating, the pulling rod is slowly lifted to grow the crystal. To prevent the oxidation of both melt and crystal, the entire process is performed in an oxygen- and moisture-free atmosphere.
Suitable materials crystallized by this method include intermetallic compounds that are potentially damaged by oxidization. For this purpose, the furnace includes a high vacuum system to prevent oxidization (5x 10-6 Torr).
Caractéristiques techniques
| Chamber | Stainless steel (double walled and cooling water | |
| Working pressure range | 5x10-6 Torr (within 1 hour)～1.1 Atm | |
| Vacuum discharge system | Turbo molecular pump: 220 L/sec and rotary pump 100 L/min | |
| Vacuum gage measurement range | 760 Torr～1x10-9 Torr | |
| Arc generator/Getter generator | 200 A/each generator for each electrode x 5 units | |
| Pulling shaft | Shaft seal | Stainless/ferro-fluidic seal and bellows |
| Normal travel speed | 0-39 mm/hr (servo-motor) | |
| Travel stroke | 150 mm | |
| Speed stability travel | ±1.0 % FS | |
| Rapid travel speed | 175 mm/min (fix） | |
| Rotation speed | 0-10 rpm | |
| Hearth shaft | Shaft seal | Stainless /ferro-fluidic seal and bellows |
| Rotation speed | 0-10 rpm | |
Applications
Téléchargements
Vidéos
Clients de référence
Single-Crystal Growth of f-Electron Intermetallics in a Tetra-Arc Czochralski Furnace, M. Szlawska and D. Kaczorowski, ACTA Physica Polonica A, Vol. 124, Page 336 (2013).
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Quantum Design S.A.R.L.
Avenue de l’Atlantique
Bâtiment Fuji Yama
91940 Les Ulis
France
| Tél. : | 01 69 19 49 49 |
| Email : | franceqd-europe.com |
