28. Juni 2020
- 01. Juli 2020
Ghent, Belgium
ALD/ALE2020 / Virtual Meeting
20th International Conference on Atomic Layer DepositionQuantum Design together with J.A. Woollam Co., Inc. we present our in-situ spectroscopic ellipsometers to be used with ALD/ALE chambers for real time monitoring of layer growth and etching.
Thomas
Wagner
Produkt Manager - Ellipsometrie / Oberflächenwissenschaften
+49 6157 80710-68 | |
+49 6157 80710968 | |
E-Mail schreiben |
Thomas
Wagner