AFSEM nano

from QD-Microscopy

AFSEM is an atomic force microscope (AFM), designed for integration in a SEM or Dualbeam (SEM/FIB) microscope. Its open access design allows you to simultaneously operate SEM and AFM inside the SEM vacuum chamber. The correlated image data of AFM and SEM enable unique characterization of your sample, and the combination of complementary techniques is a key success factor for gaining new insights into the micro and nano worlds.

AFSEM lets you simultaneously image your sample with high resolution, create true 3D-topography representations, and accurately measure heights, distances and even material properties, all while maintaining the large SEM field of view to position your AFSEM cantilever exactly where you want it. The powerful AFSEM control software allows for optimized and intuitive measuring, system handling, and data analysis.

Features
  • Small size; does not impede SEM operation
  • Multiple measurement modes available
  • Uses self-sensing cantilevers
  • Powerful easy-to-use control software
  • Compatible with most SEMs/FIBs

Further information

The AFSEM is a fully functional atomic force microscope and therefore is capable of all normal measurement modes expected from a standard AFM. Contact mode, intermittent contact mode, non-contact, force-volume, and phase contrast mode are all available and the user can switch between them easily using the controller software. The advanced modes, namely Conductive AFM (C-AFM), Magnetic Force Microscopy (MFM) and Electrostatic Force Microscopy (EFM) are also available by using the functional probes. Kelvin Probe Force Microscopy (KPFM) and Scanning Thermal Microscopy (SThM) are currently under development.

AFSEM nano - Introduction Video

Measurement modes:
Standard AFM

In contact mode, the tip is in contact with the surface of the sample and follows the topography closely in the repulsive regime. For contact mode long and soft cantilevers with low force constants are used.

(Figures 1 and 2) AFSEM image of a polymer surface obtained in contact mode.

In intermittent contact mode, also called dynamic mode, the cantilever is oscillated near its resonance frequency. When the tip comes close to the surface, the interaction between the tip and the sample cause the amplitude of the oscillation to change. As the cantilever is scanning over the sample, the height is adjusted to maintain a set cantilever oscillation amplitude. An AFM image is therefore produced by imaging the force of the intermittent contacts of the tip with the surface.

AFSEM image of freestanding graphene membranes obtained in intermittent contact mode.
(Figure 1) Correlative SEM/AFM image of the graphene membranes.
(Figure 2) High-resolution AFM image of a single freestanding graphene membrane.

In non-contact mode, the tip of the cantilever does not contact the sample surface. The tip is oscillated only with a very small amplitude and is affected only by the long-range forces and therefore neither sample degradation nor tip degradation occur.

AFSEM image of silicon micro-pillar surface obtained in non-contact mode
(Figure 1) Correlative SEM/AFM image of the micro-pillar surface.
(Figure 2) High-resolution AFM image of the micro-pillar surface decorated with nano-wire network.

In force-volume mode, force measurements are combined with topographic imaging. Typical AFM images depict the topography of a surface by measuring the action of a feedback loop to maintain a constant tip/sample interaction as the tip is scanned across the surface. The force volume data set combines nearly simultaneously measured topographic and force information into a single data set allowing the microscopist to test for correlations between forces and surface features.

AFSEM image of bone sample with a partially dissolved implant obtained in force volume mode.
(Figure 1) AFM Topography image of the bone area and transition region, where the implant is partially dissolved.
(Figure 2) Force volume data of the same area.
(Figure 3) Overlay of topography and force volume data.

C-AFM

Conductive AFM mode (C-AFM) measures the conductive properties of the sample using a conductive tip. The conductive tips used by AFSEM are produced using Focused Electron Beam Induced Deposition (FEBID) and are made of pure Platinum, which ensures their high stability and longevity. There is no extra module needed for C-AFM measurements.

AFSEM C-AFM image of a gold electrode on a silicon substrate.
(Figure 1) SEM image of the region of interest displaying the gold electrode with a porous transition region at the edge of the electrode structure.
(Figure 2) AFM Topography image of the electrode structure.
(Figure 3) C-AFM image of the electrode structure that reveals the highly conducting gold electrode as well as the non-conducting silicon surface region.

MFM

Magnetic AFM Mode (MFM) is used to study the magnetic properties of magnetic materials using a magnetic tip. The conductive tips used by AFSEM are produced using Focused Electron Beam Induced Deposition (FEBID) and are made of Fe/Co. AFSEM uses a dual pass technique:  A first scan images the topography. Then a second scan, where the tip follows the measured topography with a set distance above the sample, measures the phase shift due to magnetic force between tip and sample. By default, the AFSEM is capable of this so called "lift-mode".

AFSEM MFM image obtained on a multilayered magnetic sample.
(Figure 1) AFM Topography.
(Figure 2) MFM Phase contrast revealing the different magnetic domains.
(Figure 3) Overlay of topography and magnetic signal.

Specifications

AFSEM nano is the smallest AFM isnert for your SEM/FIB. Its small size and weight enable easy-integration in extremely space-limited environments. The full grade V titanium body offers optimized mechanical stability and performance.

Sample Limitations

Unlimited in terms of size and weight

Scanner Specifications

 

Scanner Dimensions

61mm x 51mm x 28mm

Scanner Weight

180g

Scan Range

24µm x 24µm

HV compatibility

1x10^(-7)

Positioning Stage

 

Travel Range

x/y/z: 12mm

Coarse Resolution

100nm (minimum, user controllable)

High-Speed Controller

 

Measurement Modes

Supports all standard and advanced measurement modes modes (c-AFM, MFM, EFM, KPFM, SThM,…)

Input/Output

8 channels (156 kHz, 24 bit, on demand user configurable)

High Voltage Amplifier

3 high-bandwidth channels (x,y: 10 kHz, z: 300kHz)

Downloads

AFSEM & AFSEM nano
In situ MFM of magnetic multilayers Application Note
Conductive analysis Application Note

Videos

AFSEM® Webinar - The leading solution for in situ correlative AFM, SEM, EDX analysis
AFSEM Nanowire Demo

Contact

Dr. Simone Paziani
Dr. Simone Paziani

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Contact

Quantum Design s.r.l.

Via Francesco Sapori, 27
00143 Roma
Italy

Phone:+39 06 5004204
Fax:+39 06 5010389
E-mail:italy@qd-europe.com
Dr. Simone PazianiSales Director
+39 06 5004204
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