Correlative Microscopy Platform for AFM, SEM, EDS and Nanoprobing – FusionScope

FusionScope from Quantum Design

Correlative Microscopy with the FusionScope

The FusionScope is a microscopy platform for correlative analysis, combining multiple high-resolution techniques in a single instrument: Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM), with Energy Dispersive Spectroscopy (EDS) and Nanoprobing available as optional methods. Thanks to a shared coordinate system across all techniques, complementary data from the same region can be directly viewed in context, revealing how the information provided by different imaging techniques is interrelated. This correlative approach opens up possibilities for deeper insights and a more comprehensive understanding of materials, nanostructures, electronic devices and surfaces.

Features

Correlation of microscopy data
SEM for ultrafast identification of structures for AFM
High-precision AFM navigation with SEM in 3D
One instrument → no sample transfer

Further information

Correlation of microscopy data

e.g., EDS & AFM: Correlate chemical information with roughness, conductivity, and mechanical properties
e.g., SEM & AFM: Distinguish surface vs. subsurface features with AFM data

Use SEM for ultrafast identification of structures for AFM

Targeted particle analysis
Precise fiber detection and characterization
Rapid nanostructure localization and investigation

High-precision AFM navigation with SEM in 3D

Up to 80° tilt with Profile View

Effortless AFM on corrugated samples
Easy access to hard-to-reach regions
Live monitoring and verification of AFM measurements

One instrument → no sample transfer → full control

Eliminates the need to relocate measurement regions
Saves instrument and operator time
Prevents sample contamination or alteration

Available Microscopy & Analysis Modes

Atomic Force Microscopy (AFM)

Contact Mode
Dynamic Mode (Tapping)
Force-Distance Curves
Magnetic Force Microscopy (MFM)
Electrostatic Force Microscopy (EFM)
Conductive AFM (C-AFM)
FIRE Mode

Scanning Electron Microscopy (SEM)

Secondary Electron (SE) Imaging

Energy Dispersive Spectroscopy (EDS)

Elemental Analysis
Spectrum Acquisition
Elemental Mapping

Nanoprobing

Voltage Biasing for I-V Curves, EFM and C-AFM
Electron Beam Induced Current (EBIC)
Electron Beam Absorbed Current (EBAC)

FusionScope Software

FusionScope provides a unified software environment for AFM, SEM and EDS. Measurements from the different techniques can be correlated within the shared coordinate system, while integrated workflows support efficient navigation, measurement and analysis.

Specifications

AFM

Parameter	Specification
XY Scan Range	22 × 22 µm (closed loop)
Z Scan Range	11 µm
Imaging Noise	<50 pm at 1 kHz
Cantilever Probes	Self-sensing piezoresistive

SEM

Parameter	Specification
Electron Source	Thermal field emission
Acceleration Voltage	3.5–15 kV
Probe Current	5 pA–2.5 nA (300 pA typical)
Magnification	25×–200,000×
Detector	In-chamber Everhart-Thornley secondary-electron detector

EDS Option

Parameter	Specification
System Resolution	<133 eV at Mn-Kα @ 14 kcps @ 1 µs peaking time
Detection Range	Carbon–Uranium
Spectrum Mode	Yes
Elemental Mapping	Yes
Detector Type	Silicon drift detector (SDD)

Sample and Chamber

Parameter	Specification
Maximum Sample Diameter	20 mm (12 mm Full Correlated Mode)
Maximum Sample Height	20 mm
Maximum Sample Weight	500 g
Eucentric Alignment	Automatic
Typical Chamber Vacuum	10^-4–10^-5 mbar
Pumping Time	<5 min
Trunnion Tilt	-10° to 80°