MicroWriter laser lithography system
![Laser lithography system Laser lithography system](/fileadmin/Mediapool/spectrum/E22/MicroMusic.png)
MicroWriter is a flexible photolithography machine designed for rapid prototyping and small-volume manufacturing in R&D laboratories and small clean rooms. Conventional approaches to photolithography are usually based on exposing through a chromium-glass mask manufactured by specialist vendors. The fact that all of the wafer is exposed in parallel makes this technique fast. The alternative conventional approach is to use direct-write laser lithography, where a computer-controlled laser writes directly to the wafer. The optics required to make a direct-write machine expose quickly are extremely complicated and result either in the machine being very expensive (~€1M) or very slow (~18 hours exposure time for a single wafer).
The low-cost MicroWriter combines the flexibility of maskless direct writing with the speed of parallel exposure.
Contact
+49 6157 80710-12 | |
+49 6157 80710912 | |
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![Product Manager - Electron microscopy & nanotechnology - Dr. Andreas Bergner Dr. Andreas Bergner](/fileadmin/_processed_/1/a/csm_AndreasBergner_8440170d9d.jpg)