MicroWriter laser lithography system

MicroWriter is a flexible photolithography machine designed for rapid prototyping and small-volume manufacturing in R&D laboratories and small clean rooms. Conventional approaches to photolithography are usually based on exposing through a chromium-glass mask manufactured by specialist vendors. The fact that all of the wafer is exposed in parallel makes this technique fast. The alternative conventional approach is to use direct-write laser lithography, where a computer-controlled laser writes directly to the wafer. The optics required to make a direct-write machine expose quickly are extremely complicated and result either in the machine being very expensive (~€1M) or very slow (~18 hours exposure time for a single wafer).
The low-cost MicroWriter combines the flexibility of maskless direct writing with the speed of parallel exposure.

More about the laser lithography system MicroWriter

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Dr. Andreas Bergner
Dr. Andreas Bergner

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Quantum Design GmbH

Im Tiefen See 58
64293 Darmstadt
Germany

Phone:+49 6151 8806-0
Fax:+49 6151 8806920
E-mail:germany@qd-europe.com
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Andreas BergnerProduct Manager - Electron microscopy & nanotechnology
+49 6151 8806-12
bergner@qd-europe.com