Woollam newsletter #20 out now

Many interesting articles around spectroscopic ellipsometry are featured in Woollam’s latest newsletter.
The category “Featured Researcher” has long since been a newsletter classic. This time, Woollam present Prof. Ludvik Martinu of the Polytechnique in Montreal. His research involves ellipsometry work on ALD- and PECVC-coatings and the analysis of temperature-dependent characteristics of VO2.
The story about Harland Tompkins appreciates the lifetime achievement of someone who is well known and valued in the community through essential books on ellipsometry and especially spectroscopic ellipsometry.

The story about Harland Tompkins appreciates the lifetime achievement of someone who is well known and valued in the community through essential books on ellipsometry and especially spectroscopic ellipsometry.
The featured new product is Theta-SE – a spectroscopic ellipsometer that was especially designed for the examination of homogeneity of film thickness and optical constants of large-format samples with diameters up to 300 mm. The dual-rotating technology in combination with patented, camera-based sample alignment allows precise spectroscopic measurements at high speeds. Theta-SE comes with focusing option and, thanks to the small measurement spot, enables measurements with high lateral resolution. Despite the 300 mm mapping table and included electronics, it has the same small footprint as our Alpha-SE. And just like Alpha-SE, M-2000 and RC2, it uses powerful and user-friendly CompleteEASE software. Its user interface allows for automated recipes with flexibly programmable scan patterns, quick data acquisition and automated analysis models.

Specifications:

Spectral Range

400 - 1000 nm
Mapping area

up to 300 mm in diameter

Data acquisition rate

0.3 s (fastest)
1-2 s (typical)

Spot size

Nominal 250 x 600 µm (on the sample)

AOI

65°
Data types

Spectroscopic ellipsometry, g-SE or Mueller matrix

 

Other articles in this newsletter:

  • About Woollam Co.
  • The year 2020 in numbers
  • Linkam case study temperature-dependent ellipsometry (fig. 4)
  • Software update: CompleteEASE 6
  • Ellipsometry webinar series

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Contact

Thomas Wagner
Thomas Wagner

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Quantum Design GmbH

Im Tiefen See 58
64293 Darmstadt
Germany

Phone:+49 6151 8806-0
Fax:+49 6151 8806920
E-mail:germany@qd-europe.com
Thomas WagnerProduct Manager - Ellipsometry & Surface Science
+49 6151 8806-68
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