Apex XCT – ultrafast sub-micron CT for semiconductor applications
from SIGRAYOur partner Sigray developed the Apex XCT-150 to overcome common problems with ct measurements of typical semicon samples like wafers or graphic cards such as long scanning times and image artifacts. The Apex XCT-150 is able to get comparable results in minutes instead of many hours compared to traditional ct measurements.
- 3D imaging on intact samples up to 300 mm diameter
- 0.5 µm 3D spatial resolution in <15 minutes
- no beam hardening artifacts
Further information
Computer Tomography is used since the early 2000 to get true 3D information with resolutions down to 1 µm without destroying the sample. However, there are several common problems with traditional ct system when measuring typical semicon samples like complete boards, wafers and PCBs. Those type of samples require very long measuring times and the results will often struggle with image artifacts such as beam hardening, streaking/curtaining, photon starvation and metal artifacts. The Apex XCT-150 overcomes these problems due to its unique and patented architecture.
Elemination of image artifacts
Apex XCT eliminates many of the imaging artifacts that affect operation of conventional 3D X-ray systems, such as beam hardening, streaking/curtaining, photon starvation, and metal artifacts. Compare the same region imaged with Apex XCT (Left) and a leading Conventional XRM/microCT (Right) – the Apex XCT result demonstrates a dramatic increase in image quality while also offering a significantly reduced scan time.
Specifications
| Technical Specifications of the Apex XCT-150 | ||
| Parameter | Specification | |
| Overall | Spatial Resolution | 0.5 μm |
| Minimum Voxel | 70 nm | |
| Source | Type | Nanofocus Sealed Tube Transmission X-Ray Source |
| Voltage | 30 - 160 kVp | |
| Power | 25 W | |
| Target(s) | Tungsten | |
| Detector(s) | Type | 6.7 MP 50 micron pixel size 9 FPS 14x11 cm (Upgrade) 26.9 MP 50 micron pixel 22 fps 28x24 cm |
| Visible Light Camera | 16MP alignment camera | |
| Software | Command and Control | Sigray 3D with Intuitive interface |
| Reconstruction | GigaRecon - fastest commercial CBCT reconstruction software | |
| Continuous (or Fly) Scan Data Acquisition | Standard | |
| Sample Handling Robot | Queue up to 20 samples without operator interventon | |
| Linux Workstation | Interface is on a Windows workstation, while a separate robust Linux workstation controls the system. Advantageous for reliable 24-7 operation. | |
| EPICS | Open-source software controls for maximum flexibility | |
| Dimensions | Footprint | 224 cm L x 125 cm W x 234 cm H |
| Sample Size | 300 mm diameter x 25 mm height | |
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Quantum Design s.r.l.
Via Francesco Sapori, 27
00143 Roma
Italy
| Phone: | +39 06 5004204 |
| Fax: | +39 06 5010389 |
| E-mail: | italy@qd-europe.com |
