LOT-QuantumDesign
Unser Partner SCL Sensortech

Self-sensing cantilevers

from SCL-Sensor.Tech

SCL-Sensor.Tech develops and manufactures silicon piezo-resistive self-sensing cantilevers. This type of all-electrical cantilever allows completely new applications in the fields of AFM, nanoprobing, force measurement and other sensing applications.

Self-sensing cantilevers are equipped with a full piezo-resistive Wheatstone bridge that directly measures the cantilever signal electrically, removing the space-consuming requirement for an optical readout. Two variable resistors are on the cantilever and two on the chip. The cantilever chip is bonded onto a small PCB with a small connector for a quick and highly reproducible cantilever exchange. The sensor signal is read out and amplified by a small pre-amplifier PCB. This enables an easy and seamless integration with various instruments (e.g., SEM, TEM and many other measurement systems). The self-sensing cantilevers are available with a variety of resonance frequencies and spring constants.

Eigenschaften
  • Self-sensing cantilevers with Silicon tip
  • Self-sensing cantilevers without tip
  • Self-sensing cantilevers with single crystal diamond tip

Weitere Informationen

Self-Sensing Cantilevers with Silicon Tip

This is considered the standard type of self-sensing cantilever. It exhibits a sharp tip made of silicon with a tip radius of <15 nm. Normally, the cantilever is delivered on our cantilever PCB (CL-PCB) with a small 10 pin connector on its lower side. On request you can order only the Si chip without PCB and connector for bonding on your own PCB holder.

This cantilever type can come with or without an integrated heater. PRSA (Piezo-Resistive Sensing & Active) cantilever probes are equipped with an additional thermal actuator (heater structure) on the cantilever. PRS (Piezo-Resistive Sensing) cantilever probes provide the sensing Wheatstone bridge (without a thermal actuator).

Self-Sensing Tipless Cantilevers

These are self-sensing cantilevers without a tip (tipless, TL). This cantilever type is especially suitable for torque magnetometry, force sensing, gas property measurements, and many more applications. The free place where normally the AFM tip is located can be used to accept your own tip, glue a sample, or other uses. Normally, the cantilever is delivered on our cantilever PCB (CL-PCB) with a small 10 pin connector on its lower side. On request you can order only the Si chip without PCB and connector for bonding on your own PCB holder.

This cantilever type can come with or without an integrated heater. PRSA (Piezo-Resistive Sensing & Active) cantilever probes are equipped with an additional thermal actuator (heater structure) on the cantilever. PRS (Piezo-Resistive Sensing) cantilever probes provide the sensing Wheatstone bridge (without a thermal actuator).

Self-Sensing Cantilevers with Single Crystal Diamond Tip

These are self-sensing cantilevers with a hard, sharp, long-life single crystal diamond tip (SCD). The cantilever is delivered on our cantilever PCB (CL-PCB) with a small 10 pin connector on its bottom side.

This cantilever type can come with or without an integrated heater. PRSA (Piezo-Resistive Sensing & Active) cantilever probes are equipped with an additional thermal actuator (heater structure) on the cantilever. PRS (Piezo-Resistive Sensing) cantilever probes provide the sensing Wheatstone bridge (without a thermal actuator).

Spezifikation

  Silicon Tip Cantilevers
(Si-Tip)
Tipless Cantilvers (TL) Single Crystal Diamond Tip Cantilevers (SCD)
Model ** PRSA-L300-F60-Si-CHP PRSA-L300-F60-TL-CHP PRSA-L300-F50-SCD-PCB
PRSA-L300-F50-Si-PCB PRSA-L300-F80-Si-PCB PRSA-L300-F50-TL-PCB PRSA-L300-F80-TL-PCB  
Tip radius (apex) <15 nm     <15 nm / 12…16 µm
Tip height 4…6 µm     Long life Single Crystal Diamond (SCD)
<100> along tip axis
Tip material silicon     non-conducting
temp-stability: up to 70°C
Resonant frequency ** 30..65 kHz 65…95 kHz 30…65 kHz 65…95 kHz 30..65 kHz
Spring constant ** 1…15 N/m 15…56 N/m 1…15 N/m 15…56 N/m 1…15 N/m
Recomm. AFM mode contact, non-contact non-contact     contact, non-contact
sensitivity* 1…2 µV/nm 1…2 µV/nm 1…2 µV/nm
force sensitivity* 0.5…56 nN/µV 0.5…56 nN/µV 0.5…56 nN/µV
Length, width 300 ±5 µm, 110 ±3 µm 300 ±5 µm / 110 ±3 µm 300 ±5 µm, 110 ±3 µm
Material silicon cantilever, boron doped 1k Ohm piezo resistors, aluminium tracks silicon cantilever, boron doped 1k Ohm piezo resistors, aluminium tracks silicon cantilever, boron doped 1k Ohm piezo resistors, aluminium tracks
Deflection sensing on chip piezo-resistive bridge on chip piezo-resistive bridge   on chip piezo-resistive bridge
Actuator external shaker or on chip heater (20-45 Ohm) external shaker or on chip heater external shaker or on chip heater (20-45 Ohm)
Electrical connections bonded to small PCB with connector (counter part PCB available) or optional bonding pads on chip bonded to small PCB with connector (counter part PCB available) or optional bonding pads on chip bonded to small PCB with connector (counter part PCB available) or optional bonding pads on chip
Chip dimensions (h, w, l) 0.3 / 1.2 / 2.5 mm 0.3 / 1.2 / 2.5 mm   0.3 / 1.2 / 2.5 mm
  * not amplified (signal direct at the chip), 2.048 V bridge supply
** Cantilever models are divided in two parameter ranges when electrical characterization is possible with bonded cantilevers
* not amplified (signal direct at the chip), 2.048 V bridge supply
** Cantilever models are divided in two parameter ranges when electrical characterization is possible with bonded cantilevers
* not amplified (signal direct at the chip), 2.048 V bridge supply

Anwendungen

Torque-Magnetometry
Gas-Flow Dynamics
Nanoprobing inside SEM/TEM
Conductive AFM
Standard AFM measurements
AFSEM – correlative AFM & SEM For an inside look into AFSEM - correlative AFM and SEM from GETec click here.

Videos

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Imaging with a SCD Tip Cantilever
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ACR cooperation award 2015: Researchers perfect nanosensor
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Econovius award SCL Sensor.Tech: self-sensing cantilever
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Mercur award 2014- 1st place IC technology: SCL self-sensing cantilever

Kontakt

Dr. Andreas Bergner
Dr. Andreas Bergner

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Kontakt

Quantum Design GmbH

Im Tiefen See 58
64293 Darmstadt
Germany

Telefon:+49 6151 8806-0
Fax:+49 6151 8806920
E-Mail:germany@qd-europe.com
Andreas BergnerProdukt Manager - Elektronenmikroskopie & Nanotechnologie
+49 6151 8806-12
bergner@qd-europe.com