Desktop Scanning Electron Microscope for Crystallographic Analysis – NANOS EBSD

Further information

Electron Backscatter Diffraction for Crystallographic Analysis

Electron backscatter diffraction (EBSD) extends SEM imaging with crystallographic information about the sample. By analyzing electron diffraction patterns, the NANOS EBSD can determine crystal orientation, identify crystalline phases and characterize grain structure. This makes it possible to move beyond surface morphology and compositional contrast and investigate the crystallographic organization of a material.

Orientation mapping across the sample provides spatially resolved information about the local crystal structure. The resulting data can be used to analyze grain orientation, phase distribution and microstructural relationships within crystalline materials.

Eucentric Tilt for a Seamless EBSD Workflow

EBSD measurements require the sample to be tilted to the measurement position. The NANOS EBSD uses a eucentric stage that allows the sample to move between the standard SEM imaging position and the 70° EBSD position while keeping the selected region of interest centered.

Because the field of view, working distance and focus are maintained during tilting, an area identified during SEM imaging can be transferred directly into the EBSD measurement position without breaking vacuum or manually repositioning the sample. This simplifies the transition from imaging to crystallographic analysis and supports a reproducible workflow.

Bruker e-Flash XS EBSD Detector

The NANOS EBSD integrates a Bruker e-Flash XS detector for fast acquisition of electron backscatter diffraction patterns. The CMOS-based detector provides a native image resolution of 720 × 540 pixels and supports multiple binning modes from 2 × 2 to 6 × 6. Pattern acquisition is possible at up to 520 frames per second across all binning modes.

A dedicated optical system with field lens maximizes light efficiency at the phosphor screen. The detector is connected via USB 3.0 for data and power transfer and works with the external QUANTAX scan generator as part of the EBSD measurement setup.

Crystallographic Analysis with Bruker ESPRIT

Bruker ESPRIT provides the software environment for EBSD data acquisition, indexing and crystallographic analysis. Automated and semi-automated tools support signal optimization and pattern indexing, while phase entries can be created or edited for the materials under investigation.

The software supports orientation and misorientation analysis, automatic grain reconstruction and grain statistics, grain-boundary analysis and crystallographic texture evaluation. Included phase databases assist with phase definition, while maps, histograms and analysis results can be exported for further processing and documentation.

SEM Imaging and Elemental Analysis

Beyond crystallographic analysis, the NANOS EBSD retains the imaging capabilities of the NANOS platform. A secondary electron detector provides detailed surface information, while a four-quadrant backscattered electron detector adds compositional contrast and topographical information.

In the EDS configuration, a fully integrated silicon drift detector extends the system with elemental analysis. Point analysis, line scans and elemental mapping can be used alongside SEM imaging, allowing structural, compositional and crystallographic information to be investigated on the same platform.

Sample Handling, Vacuum and Sample Requirements

The NANOS EBSD uses the compact sample-handling concept of the NANOS platform, with motorized XY movement and high- and low-vacuum operation. The eucentric stage supports the transition between SEM imaging and the 70° EBSD measurement position while keeping the selected area of interest centered.

Because EBSD requires a defined detector and sample geometry, the usable sample dimensions depend on the installed EBSD configuration and the required tilt position. Sample size, holder geometry and the available tilt range therefore need to be considered together when configuring the system for a specific application.

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