Compact scanning electron microscope FlexSEM 1000

The  compact SEM FlexSEM 1000 offers complete SEM analysis under variable pressure conditions with a small footprint. The instrument is equipped with a pre-centered tungsten filament, easy to maintain and to change within minutes. It can be operated at acceleration voltages between 0.3 – 20 kV and thus reveals ultra-sensitive surface analysis of any material incl. vacuum sensitive samples. Chemical information of almost the complete period system of elements is accessible via EDX. Imaging is either done with a high-sensitive 4-quadrant BSE detector, under high- or low-vacuum conditions, or with an Everhart Thornley SE detector. Both image modes can be combined. In Secondary Electron (SE) mode the FlexSEM 1000 reaches a resolution of 4 nm at 20 kV (15 nm at 1 kV), in backscattering electron (BSE) mode 5 nm at 20 kV and magnifications up to 800.000x (display). A 3-axis sample stage offers Z-height, tilt and rotation (360°) in addition to X and Y movements. The clear user interface was designed for ease-to-use operation. The software offers a huge variation of automated adjustable parameters such as brightness, contrast, alignment, focus, reports, stage position, and so on. The OS Windows 10 guarantees an easy access to the (network)environment.