Widest spectral range ellipsometer VASE
From Woollam Co.The VASE is our most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers and more.
- Ex-situ spectroscopic ellipsometer
- Wide spectral range from 193 to 4000 nm
- Maximum data accuracy
- High spectral resolution and perfect R&D flexibility
Further information
It combines high accuracy and precision with a wide spectral range from 193 to 4000 nm. Variable wavelength and angle of incidence allow flexible measurement capabilities including:
- Reflection and transmission ellipsometry
- Generalized ellipsometry
- Reflectance (R) intensity
- Transmittance (T) intensity
- Cross-polarized R/T
- Depolarization
- Scatterometry
- Mueller matrix
Maximum data accuracy
The VASE features a rotating analyzer ellipsometer (RAE) combined with our patented AutoRetarder for unparalleled data accuracy.
High-precision wavelength selection
The HS-190TM scanning monochromator is designed specifically for spectroscopic ellipsometry. It optimizes speed, wavelength accuracy, and light throughput, while automatically controlling selection of wavelengths and spectral resolution.
Flexible measurements
The VASE features a vertical sample mount to accommodate a large variety of measurement geometries including reflection, transmission, and scattering.
Specifications
- vertical sample mount
- computer-controlled angle of incidence goniometer 20° - 90°
- single or double chamber monochromator
- spectral range 250 - 2500 nm (standard)
- DUV from 193 nm
- NIR to 3200 nm or 4000 nm
- computer-controlled mapping unit: 50 mm XY
- computer controlled sample rotator
- AutoRetarder
- manual 50 mm XY translation
- 200 µm focused beam option
- camera
- cryostat (4.2 to 500 K or 4.2 to 800 K)
- heat cell (RT to 300 °C or -80 °C to +600 °C)
Applications
Downloads
Contact
| +49 6157 80710-68 | |
| +49 6157 80710968 | |
| Write e-mail |
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Contact
Quantum Design GmbH
Breitwieserweg 9
64319 Pfungstadt
Germany
| Phone: | +49 6157 80710-0 |
| Fax: | +49 6157 807109 |
| E-mail: | germanyqd-europe.com |
